N/MEMS Resonator Matrix Filter Without Mechanical Coupling
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Solution Overview
Problem
Existing resonant filters, particularly those using MEMS and NEMS resonators, face challenges such as bulkiness, manufacturing complexity, parameter dispersion, non-linearity, and environmental sensitivity, leading to poor performance and high production costs due to mechanical coupling and complex electronic processing.
Innovation Solution
A resonant filter design featuring a matrix of n×m N/MEMS resonators with similar dimensions, where actuating and detecting means are integrated to process electrical signals without mechanical coupling, leveraging dispersion for precise frequency control and reduced bulkiness, and eliminating the need for complex electronics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If mechanically coupled MEMS resonators are used to achieve signal processing functions, then power consumption is reduced and linearity is improved, but parameter dispersion increases and system complexity increases
Solution Approach 1:
The filter is segmented into multiple independent resonator circuits (at least two resonators with different resonance frequencies), each operating independently without mechanical coupling. This segmentation eliminates parameter dispersion issues while maintaining the power-saving benefits of resonator-based signal processing.
Solution Approach 2:
The patent replaces mechanical coupling between resonators with electrical coupling through a shared resonant circuit. The mechanical coupling that causes parameter dispersion is substituted with an electrical architecture where multiple resonators share common nodes, eliminating the harmful mechanical interactions while preserving the desired signal processing functions.
2Volume of moving object
If NEMS resonators are used to reduce filter size, then bulk is reduced, but output signal amplitude decreases and modeling complexity increases
Solution Approach 1:
Multiple NEMS resonators are merged into a shared resonant circuit with common electrical nodes. This merging allows the weak output signals from individual NEMS resonators to be combined constructively, compensating for the low amplitude issue while maintaining the compact size benefits of NEMS technology.
3Adaptability or versatility
If a larger number of resonators are coupled to achieve sophisticated filtering functions, then filtering performance is improved, but manufacturing complexity increases and parameter uncertainty increases
Solution Approach 1:
The patent creates a universal resonant circuit architecture where multiple resonators share common electrical nodes and can be configured to perform different filtering functions. This multi-functional design allows sophisticated filtering capabilities to be achieved without proportionally increasing manufacturing complexity, as the basic circuit topology remains consistent regardless of the number of resonators.
4Loss of energy
If resonators are connected in series to decrease series resistance, then damping is reduced, but device complexity increases
Solution Approach 1:
Multiple resonators are merged into a shared resonant circuit with common series nodes, effectively combining their impedance characteristics. This merging reduces the overall series resistance and damping without requiring complex series connections, as the shared nodes naturally provide the low-resistance path.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables high-performance filtering with broad bandwidth, reduced size, and lower production costs by averaging resonator responses and exploiting frequency dispersion, resulting in improved selectivity and noise resistance.
Implementation Method 1
a resonant filter comprising a matrix of n×m resonators of the N/MEMS type... actuating means able to excite the resonator by controlling an electrical input signal of the filter
Implementation Method 2
means for detecting movements of the resonator able to deliver an electrical output signal whereof the value depends on the detected movements
Data Source
AI summary
A resonant filter including a matrix of n×m resonators of N/MEMS type, each resonator including an actuating mechanism and a detection mechanism. An input of the filter, configured to receive an electrical input signal, is electrically connected to the resonator actuating mechanism. The outputs of the resonator detecting mechanism are electrically connected together and to an output of the filter, such that the signal to be obtained as an output of the filter is an image of the sum of the mechanical responses of the resonators. The resonators are not mechanically coupled together.