Room-Temperature NO2 Sensor via SiO2 Mediator Film Transfer

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Solution Overview

Problem

Conventional methods for manufacturing flexible NO2 gas sensors at room temperature result in non-uniform thickness and poor adhesion of sensitive materials to the substrate, leading to inadequate bonding and distribution.

Innovation Solution

A method involving the creation of a metal electrode on a flexible substrate, followed by the deposition and calcination of an SWCNTs/SnO2 sensitive film on an SiO2 base, and subsequent bonding using a conductive silver paste to ensure secure and uniform attachment to the substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If sensitive material is deposited directly on flexible substrate using dip-coating or dispensing, then manufacturing process is simple, but adhesion is poor and thickness is non-uniform

Engineering Contradiction:
Improvemanufacturing process simplicityVSAvoidfilm thickness uniformity and adhesion quality
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent introduces an SiO2 base as an intermediary layer between the flexible substrate and the SWCNTs/SnO2 sensitive film. The sensitive film is first formed on the SiO2 base through calcination of organic metal solution, then the SiO2 base is etched away using HF acid, leaving the sensitive film bonded to the flexible substrate. This intermediary approach enables uniform film formation and strong adhesion while avoiding the limitations of direct deposition methods.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If high temperature calcination is used to form sensitive film, then material crystallinity and sensitivity are improved, but flexible substrate may be damaged

Engineering Contradiction:
Improvesensitive material crystallinity and detection sensitivityVSAvoidsubstrate integrity under thermal stress
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent segments the film formation process from the substrate by using an SiO2 base as a separate layer. The organic metal solution is calcined at high temperature (300-1000°C) on the SiO2 base to form crystalline SnO2, while the flexible substrate is protected from direct thermal exposure. After calcination, the SiO2 base is etched away with HF acid, transferring the thermally-stabilized sensitive film to the substrate without subjecting the substrate to damaging temperatures.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances adhesion and achieves uniform distribution of the sensitive material, overcoming the limitations of conventional methods by avoiding high-temperature operations and improving sensor sensitivity for NO2 detection at room temperature.

Implementation Method 1

disproportionating CO under a high pressure to generate a carbon nano tube

Methodology Applied
Scientific EffectDisproportionation reaction:

Implementation Method 2

calcining the SiO2 base for which the solvent in the suspension liquid coating is evaporated to obtain an SWCNTs/SnO2 sensitive film

Methodology Applied
Scientific EffectCalcination:

Implementation Method 3

drying to evaporate solvent in a suspension liquid coating

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 4

etching to remove the SiO2 base with HF acid to separate the SWCNTs/SnO2 sensitive film from the SiO2 base

Methodology Applied
Scientific EffectEtching:

Data Source

PatentUS9562884B2Method for manufacturing NO<sub>2 </sub>gas sensor for detection at room temperature
Publication Date: 2017.02.07 INST OF MICROELECTRONICS CHINESE ACAD OF SCI LTD
  • US9562884B2 patent drawing
  • US9562884B2 patent drawing
  • US9562884B2 patent drawing

AI summary

A method for manufacturing an NO2 gas sensor for detection at room temperature comprises: manufacturing a metal electrode on a surface of a flexible substrate; manufacturing an SWCNTs/SnO2 sensitive film; and bonding the SWCNTs/SnO2 sensitive film with a portion of the surface of the flexible substrate with the metal electrode, so as to form the NO2 gas sensor for detection at room temperature. The present disclosure solves the problems of the poor adhesion between the sensitive material and the flexible substrate, and a non-uniform distribution, and achieves the purposes of secure bonding between the sensitive material and the flexible substrate, and uniform distribution.