Non-Aligned Gate Structure for PUF Threshold Voltage Variation

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Solution Overview

Problem

Existing PUF arrays in integrated circuits face challenges in ensuring a repeatable unique response under varying deployment conditions and throughout the device's lifespan due to insufficient variation in transistor threshold voltages.

Innovation Solution

The implementation of non-aligned semiconductor regions with a gate structure extending over both regions increases the variation in threshold voltage, enhancing the uniqueness and reliability of the PUF array's response by manufacturing semiconductor regions with varying sizes and alignments.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If aligned semiconductor regions are used in PUF arrays, then manufacturing precision is improved, but threshold voltage variation is insufficient

Engineering Contradiction:
Improvealignment precisionVSAvoidthreshold voltage variation
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent applies asymmetry by intentionally designing semiconductor regions with non-aligned widthwise ends, creating asymmetric transistor structures where the source and drain regions have different effective widths. This asymmetric configuration increases threshold voltage variation among transistors in the PUF array, enhancing the uniqueness and reliability of the PUF response while maintaining manufacturability through standard lithographic processes.

Inventive Principle:
Principle #4Asymmetry

2Reliability

If non-aligned semiconductor regions are used, then threshold voltage variation is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvethreshold voltage variationVSAvoidstructural complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies local quality by introducing non-alignment only at specific locations (widthwise ends) of the semiconductor regions while maintaining alignment at other critical interfaces. This localized asymmetry achieves the desired threshold voltage variation without requiring complex manufacturing processes, as the non-aligned regions can be formed using standard lithographic patterning and selective etching techniques.

Inventive Principle:
Principle #3Local quality

3Ease of manufacture

If uniform semiconductor regions are used, then ease of manufacture is improved, but PUF response uniqueness deteriorates

Engineering Contradiction:
Improvefabrication simplicityVSAvoidresponse uniqueness
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent introduces asymmetry in the form of non-aligned widthwise ends of adjacent semiconductor regions, creating local variations in transistor geometry. This asymmetric design can be implemented using conventional fabrication processes by adjusting lithographic patterns or etching parameters for specific regions, thereby maintaining ease of manufacture while significantly enhancing PUF response uniqueness through increased threshold voltage variation.

Inventive Principle:
Principle #4Asymmetry

Data Source

PatentUS12532746B2Structure with gate over non-aligned semiconductor regions
Publication Date: 2026.01.20 GLOBALFOUNDRIES US INC
  • US12532746B2 patent drawing
  • US12532746B2 patent drawing
  • US12532746B2 patent drawing

AI summary

Embodiments of the disclosure provide a structure and related method for a gate over semiconductor regions that are not aligned. Structures according to the disclosure include a first semiconductor region extending from a first widthwise end to a second widthwise end within a substrate. A second semiconductor region is adjacent the first semiconductor region and extends from a first widthwise end to a second widthwise end within the substrate. The second widthwise end of the second semiconductor region is non-aligned with the second widthwise end of the first semiconductor region. A gate structure is over the substrate and extends widthwise over the first semiconductor region and the second semiconductor region.