Non-Azeotropic Cleaning Composition for Sub-Micron Particle Removal

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Solution Overview

Problem

Existing cleaning compositions for precision machinery parts, such as semiconductor-related and optical-related parts, are inadequate in removing very fine particles of sub-micron size, and fluorine-based organic solvents used in these compositions pose environmental and safety concerns.

Innovation Solution

A ternary non-azeotropic mixture of Z-1,1,1,4,4,4-hexafluoro-2-butene, methylperfluoroheptene ethers, and ethanol is developed, which maintains composition stability during distillation and effectively removes sub-micron particles while minimizing environmental impact and ensuring safety.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If azeotropic blends of volatile organic compounds are used as cleaning compositions, then cleaning performance is improved, but environmental harm and health risks increase due to air quality regulations

Engineering Contradiction:
Improvecleaning performanceVSAvoidenvironmental harm and health risks
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent changes the chemical composition parameters by replacing azeotropic VOC blends with non-azeotropic formulations containing specific amounts of water, fluorinated alcohols, and hydrocarbons. This parameter change maintains cleaning effectiveness while reducing environmental harm and health risks associated with traditional azeotropic cleaners.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite cleaning composition by combining multiple components (water, fluorinated alcohols like HFIP and 1,1,1,2,3,3,3-heptafluoropropan-2-ol, and hydrocarbons) in specific ratios. This composite approach achieves the cleaning performance of azeotropic blends without the harmful environmental and health effects.

Inventive Principle:
Principle #40Composite materials

2Object-affected harmful factors

If non-azeotropic cleaning compositions are formulated to replace azeotropic blends, then environmental compliance is improved, but formulation complexity increases

Engineering Contradiction:
Improveenvironmental complianceVSAvoidformulation complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent establishes specific parameter ranges for each component (e.g., water: 1-40 wt%, fluorinated alcohols: 5-80 wt%, hydrocarbons: 10-80 wt%) to simplify the formulation process. By defining these parameters, the patent reduces formulation complexity while ensuring environmental compliance and consistent cleaning performance.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If fluorinated alcohols and hydrocarbons are combined in non-azeotropic formulations, then cleaning effectiveness is maintained, but volatility control becomes more challenging

Engineering Contradiction:
Improvecleaning effectivenessVSAvoidvolatility control
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent controls volatility by adjusting the composition parameters, specifically balancing the evaporation rates of fluorinated alcohols and hydrocarbons. By optimizing the ratios of these components within defined ranges, the patent achieves consistent evaporation characteristics and cleaning effectiveness without excessive volatility control complexity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The non-azeotropic mixture achieves high cleaning capacity, maintains composition integrity, and reduces environmental burden and safety risks, effectively removing sub-micron particles from precision machinery parts.

Implementation Method 1

non-azeotropic cleaning compositions that dry without residue

Methodology Applied
Scientific EffectEvaporation: Evaporation

Data Source

PatentEP3802769B1Non-azeotropic cleaning composition
Publication Date: 2026.05.20 CHEMOURS MITSUI FLUOROPRODUCTS CO LTD
  • EP3802769B1 patent drawingFigure 1

AI summary

Cleaning composition which is suitable for cleaning precision machinery parts and exhibits a small environmental burden as well as excellent safety and economic efficiency. The cleaning composition comprises 50-80% by weight Z-1,1,1,4,4,4-hexafluoro-2-butene, 10-30% by weight methylperfluoroheptene ethers, and 5-25% by weight ethanol. Also disclosed is a cleaning method comprising: cleaning an object having particulate contamination using the composition in a cleaning tank (liquid layer) and rinsing with a rinsing layer (steam layer), wherein the temperature difference between the cleaning tank and the rinsing layer is not less than 20°C.