Non-Circular Orifice Valve for High-Purity Flow Conductance

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing valve designs for high-purity fluid delivery systems often suffer from contamination issues due to mechanical shafts and packing-type seals, and struggle to achieve maximum flow conductance due to limited control element translation and circular orifice constraints.

Innovation Solution

A high-conductance valve design featuring a non-circular orifice ridge with a path of changing curvature, including kidney-like and petal-like shapes, which increases the effective opening area by elongating the orifice ridge periphery, allowing for greater fluid flow while minimizing contamination risks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a circular orifice is used in conventional valve design, then the valve structure is simple and easy to manufacture, but the flow conductance is limited

Engineering Contradiction:
Improveflow conductanceVSAvoidorifice ridge geometry
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent applies asymmetry by replacing the conventional circular orifice with a non-circular orifice ridge having a path of changing curvature. This asymmetric geometry elongates the periphery length without increasing the footprint area, thereby increasing the effective opening area and flow conductance by up to 74% compared to circular orifice valves of similar size.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent transitions from a simple circular geometry to a two-dimensional non-circular path with varying curvature. This dimensional complexity allows the orifice ridge periphery to extend further within the same footprint, creating a longer effective flow path and larger effective opening area that accommodates greater fluid flow.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If mechanical shafts and packing-type seals are used in valve design, then the valve structure is simple, but contamination of high-purity process materials occurs

Engineering Contradiction:
Improvepurity of process materialsVSAvoidsealing mechanism
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent employs a flexible membrane diaphragm as the control element that seals against a toroidal bead valve seat. This flexible film approach eliminates mechanical shafts and packing-type seals that cause particulate contamination, while maintaining reliable sealing through the elastic deformation of the diaphragm against the toroidal bead seat.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The patent replaces the traditional mechanical shaft and packing seal system with a membrane-based sealing mechanism. The flexible diaphragm acts as both the control element and sealing element, eliminating the need for sliding or rotating mechanical components that generate contamination in high-purity fluid delivery systems.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Area of moving object

If the control element translation is limited in conventional valves, then the valve size is compact, but the effective opening area is restricted

Engineering Contradiction:
Improveeffective opening areaVSAvoidcontrol element translation
Core Design Contradiction:
Area of moving objectVSEase of operation

Solution Approach 1:

The non-circular orifice ridge geometry with its elongated periphery allows the control element to achieve a larger effective opening area for the same translation distance. The asymmetric shape maximizes the use of available space, creating a larger flow passage that increases conductance without requiring additional valve size or control travel.

Inventive Principle:
Principle #4Asymmetry

Data Source

PatentUS10941867B2High conductance valve for fluids and vapors
Publication Date: 2021.03.09 HORIBA STEC CO LTD
  • US10941867B2 patent drawing
  • US10941867B2 patent drawing
  • US10941867B2 patent drawing

AI summary

A high conductance valve for use in fluid delivery systems is comprised of a flat non-circular orifice ridge adjacent to which a control plate having a planar control surface is proximally positioned to adjust the valve effective opening area and thereby the conductance of the valve. The length of the non-circular orifice ridge periphery is substantially greater than the circumference of a similarly sized circular orifice and therefore the realized effective opening area is also substantially greater despite having a similar footprint.