Non-Circular Pulley Robot Arm for Precise Substrate Orientation
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Solution Overview
Problem
Existing robotic systems for transporting substrates in semiconductor and other manufacturing processes face challenges in efficiently navigating multiple stations with precise orientation control, especially in clean or vacuum environments where space is limited.
Innovation Solution
The development of a robot arm mechanism with a drive unit featuring multiple rotatable axes and band arrangements providing variable transmission ratios, allowing for precise control of end-effector orientation and movement between multiple stations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a robot arm mechanism with variable transmission ratio band arrangements is used, then precise control of end-effector orientation is improved, but device complexity increases
Solution Approach 1:
The patent applies dynamics by implementing variable transmission ratios in the band arrangements rather than fixed ratios. This allows the transmission ratio to change dynamically during operation, enabling precise orientation control of the end effector at different positions while managing the complexity through controlled variability rather than static complexity
Solution Approach 2:
The patent changes the transmission ratio parameter of the band arrangements to achieve precise end-effector orientation. By varying this parameter across different operating conditions, the system achieves high precision control without requiring equally complex mechanical structures for each position
2Manufacturing precision
If multiple drive axes with variable transmission ratios are used, then transport precision between stations is improved, but device complexity increases
Solution Approach 1:
The patent applies universality by having the multiple drive axes and band arrangements serve dual functions: they provide both the motion transmission and the precision positioning simultaneously. The variable transmission ratios enable the same mechanism to handle different precision requirements at different operational phases
Solution Approach 2:
The drive unit employs dynamic transmission ratios that can be adjusted based on operational requirements, allowing the system to achieve high precision substrate transport without requiring equally complex mechanical structures for each positioning function
3Volume of moving object
If compact robot arm design is used for clean environment, then space utilization is improved, but ease of operation decreases
Solution Approach 1:
The patent applies the nesting principle by placing the second drive axis coaxially within the first drive axis, and the third drive axis coaxially within the second drive axis. This nested arrangement significantly reduces the overall footprint and volume of the robot system while maintaining the functionality of multiple drive axes through concentric alignment
Data Source
AI summary
An apparatus having a drive unit having a first drive axis rotatable about a first axis of rotation and a second drive axis rotatable about a second axis of rotation, the second drive axis being coaxial with and partially within the first drive axis and axially rotatable within the first drive axis. A robot arm has an upper arm connected to the drive unit at the first drive axis, a forearm coupled to the upper arm, the forearm being coupled to the upper arm at a first rotary joint and rotatable about the first rotary joint, the first rotary joint being actuatable by a first band arrangement coupled to the second drive axis, and an end effector coupled to the forearm.