Non-Optical Foreign Substance Detector for Substrate Processing
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in efficiently detecting foreign substances in processing liquids due to limitations in the positional arrangement of light projectors and receivers, which can lead to increased size and complexity, making it difficult to maintain precision and prevent abnormal processing.
Innovation Solution
A substrate processing apparatus with a foreign substance detector that includes a channel forming part, a light projector, and a light receiver positioned in non-opposite areas, allowing for reduced size and improved maintenance, while maintaining precision in foreign substance detection by irradiating light to the channel forming part and receiving scattered light for detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the light projector and light receiver are disposed opposite to each other in the channel forming part, then the detection precision may be improved, but the apparatus size increases and maintenance becomes difficult
Solution Approach 1:
The patent applies asymmetry by positioning the light projector and light receiver at non-opposite locations in the channel forming part. Specifically, the light projector is arranged at one location and the light receiver at a different location that is not directly opposite, creating an asymmetric detection configuration. This asymmetric arrangement reduces the apparatus size and simplifies maintenance while still enabling effective foreign substance detection through scattered light measurement.
2Volume of moving object
If the light projector and light receiver are disposed in a compact arrangement, then the apparatus size is reduced, but scattered light and noise increase affecting detection precision
Solution Approach 1:
The patent converts the potentially harmful effect of scattered light into a beneficial detection mechanism. By positioning the light receiver to receive scattered light from the channel forming part rather than direct light, the system uses scattered light itself as the detection signal. This approach transforms what would normally be considered noise or interference into the primary detection mechanism, enabling compact apparatus design without sacrificing detection precision.
3Measurement precision
If the light projector and light receiver are positioned to minimize scattered light interference, then detection precision is maintained, but the apparatus becomes more complex and larger
Solution Approach 1:
The patent merges the detection function directly into the channel forming part by integrating the light projector and light receiver positions within the channel structure itself. The channel forming part serves dual purposes: as the fluid passage and as the detection chamber. This integration eliminates the need for separate detection chambers or complex light shielding structures, maintaining detection precision while simplifying the overall apparatus structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables precise detection of foreign substances, reduces the size of the apparatus, and facilitates easy maintenance by preventing unnecessary scattered light and noise, thereby ensuring high reliability in monitoring the cleanliness of processing liquids.
Implementation Method 1
a light projector irradiating light to the channel forming part, and a light receiver receiving light emitted from the channel forming part as a result of irradiating light to the channel forming part by the light projector
Data Source
AI summary
According to one embodiment of the present disclosure, there is provided a substrate processing apparatus comprising: a supply passage through which fluid supplied to a substrate flows; and a foreign substance detector including a channel forming part forming a portion of the supply passage, a light projector irradiating light to the channel forming part, and a light receiver receiving light emitted from the channel forming part as a result of irradiating light to the channel forming part by the light projector, the foreign substance detector being configured to detect a foreign substance in the fluid based on a signal obtained by the light that the light receiver receives, wherein the light projector and the light receiver in the foreign substance detector are disposed in areas that are not opposite to each other in areas in upper, lower, left, right, front and rear directions of the channel forming part.