Non-Orthogonal Partition for Uniform Resist Coverage

The partition is designed with a non-orthogonal shape where the first side is inclined relative to the second side, creating an asymmetric structure. This asymmetry prevents the resist layer from being dammed up during application, ensuring uniform coverage and preventing cavity formation while maintaining manufacturing feasibility

The partition is divided into multiple sides (first side, second side, third side, fourth side) with specific geometric relationships. The first and second sides are parallel, while the third and fourth sides are parallel to each other but inclined relative to the first and second sides, creating a segmented geometric structure that achieves uniform resist coverage

The partition structure is formed in advance with the specific non-orthogonal geometry before the resist layer application. This preliminary formation of the inclined partition structure prevents cavity and defect formation during subsequent manufacturing steps, ensuring reliability without requiring additional corrective processes

The non-orthogonal shape of the partition, which might be considered a geometric complexity, is actually beneficial as it prevents the resist layer from being dammed up. The inclined sides create a geometry that naturally allows uniform resist flow and prevents cavity formation, converting what could be seen as a manufacturing complexity into a reliability-enhancing feature