Non-contact Deposition Apparatus for Large OLED Substrates
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Solution Overview
Problem
The existing deposition methods for large organic light-emitting display devices face challenges with large fine metal masks bending due to self-gravity, leading to inaccurate pattern formation and low production efficiency, as well as time-consuming alignment and separation processes.
Innovation Solution
A deposition apparatus that includes a substrate combining unit, a blocking member combining unit, a deposition unit, and a conveyer system to manage substrates and blocking members in a way that allows for precise deposition while preventing contamination, using a conveyer unit to move substrates and blocking members in a predetermined direction with the deposition assemblies spaced apart, enabling efficient and accurate layer formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a large fine metal mask is used to manufacture large organic light-emitting display devices, then the substrate size can be increased, but the mask bends due to self-gravity causing inaccurate pattern formation
Solution Approach 1:
The patent replaces the traditional mechanical contact-based deposition method (where the mask physically contacts the substrate) with a non-contact deposition method. The deposition assembly deposits material onto the substrate without physical contact, eliminating the mask bending issue caused by self-gravity while maintaining pattern accuracy for large substrates
Solution Approach 2:
The patent extracts and removes the fine metal mask from the deposition system entirely. By eliminating the mask component, the system avoids the fundamental problem of mask bending under self-gravity, achieving both large substrate processing capability and high pattern accuracy
2Productivity
If a large fine metal mask is used to simultaneously manufacture multiple organic light-emitting display devices, then production capacity increases, but the alignment and separation processes become time-consuming
Solution Approach 1:
The patent replaces the mechanical alignment and separation operations with a non-contact deposition process. The deposition assembly can precisely position and deposit material without mechanical alignment steps, and since there is no mask to separate, the time-consuming separation process is completely eliminated while maintaining high production capacity
Solution Approach 2:
The patent enables continuous deposition operation without interruption for mask alignment or separation. The deposition assembly can continuously deposit material onto multiple substrates or large-area substrates without breaking the process flow, thereby reducing cycle time and increasing production efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the accuracy and efficiency of organic light-emitting display manufacturing by preventing contamination and allowing for precise deposition on large substrates, improving production speed and reducing defects.
Implementation Method 1
a first deposition unit including one or more deposition assemblies configured to deposit a material on the substrate
Data Source
AI summary
A deposition apparatus includes a substrate combining unit configured to dispose a substrate on a moving unit including a surface, a first blocking member combining unit configured to raise a first blocking member, a first deposition unit including one or more deposition assemblies configured to deposit a material on the substrate, a first blocking member separation unit configured to separate the first blocking member downward from the moving unit, and a first conveyer unit configured to convey the moving unit in a first direction, where the one or more deposition assemblies are spaced apart from the substrate by a predetermined distance so that the material is deposited on the substrate in the first deposition unit while the moving unit is conveyed in the first direction.