Non-Contact Flow Regulator for Particle-Free Precision Control
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Solution Overview
Problem
Existing flow rate regulating devices face challenges in maintaining high fluid purity due to particle generation caused by assembly and dimensional errors between valve body and seat components, particularly when handling high-purity liquids like those in semiconductor manufacturing.
Innovation Solution
A flow rate regulating device with a valve body and seat configuration that maintains a non-contact state and includes a regulation mechanism to control the distance between flat surfaces, ensuring the valve body surface does not come into contact with the seat, and a communication channel with a smaller cross-sectional area than inflow and outflow channels to stabilize flow velocity and accurately regulate flow rates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the diaphragm needle is inserted into the fluid inlet to regulate flow rate, then flow rate control is achieved, but particles are generated due to contact between the diaphragm needle and fluid inlet when positioning or dimensional accuracy is insufficient
Solution Approach 1:
The invention extracts the harmful contact interaction between the valve body and fluid inlet by redesigning the flow rate regulation mechanism. Instead of inserting the diaphragm needle into the fluid inlet, the valve body moves parallel to the fluid inlet, maintaining a non-contact state while still regulating flow through gap control between the valve body and seat.
Solution Approach 2:
The invention inverts the traditional valve structure by making the valve body move in a direction parallel to the fluid inlet rather than perpendicular. The flow rate is regulated by changing the gap between the valve body and seat through parallel movement, which prevents contact and particle generation while achieving the same flow control function.
2Ease of manufacture
If assembly errors or dimensional errors occur during installation, then the central axes of the fluid inlet and diaphragm needle are mismatched, but this causes the diaphragm needle to contact the fluid inlet and generate particles
Solution Approach 1:
The invention designs the valve structure with built-in error compensation capability. The valve body is positioned such that even when assembly or dimensional errors occur, the valve body maintains a non-contact state with the fluid inlet through its parallel movement mechanism, preventing particle generation despite axis misalignment.
Solution Approach 2:
The invention uses a composite structure combining the valve body, seat, and parallel movement mechanism that works together to maintain proper spacing. The valve body surface and seat surface form a controlled gap that regulates flow while preventing contact, creating a system that tolerates assembly variations.
3Object-generated harmful factors
If the valve body surface is made larger than the inflow opening to prevent contact, then particle generation is inhibited, but the valve body must be precisely positioned to maintain non-contact state
Solution Approach 1:
The invention makes the valve body dynamically adjustable through parallel movement along the axis. The valve body can move to maintain the optimal gap with the seat while keeping a larger surface area than the inflow opening, ensuring non-contact operation and particle prevention while accommodating positioning requirements.
Data Source
AI summary
Provided is a flow rate regulating device including a valve body section having a flat valve body surface; a main body section including a valve chamber, an inflow channel, an outflow channel, and a communication channel; a valve seat section having a flat valve seat surface provided around an inflow opening; a regulation mechanism that moves the valve body section along an axis to regulate a distance between the valve body surface and the valve seat surface; and a control unit that controls the regulation mechanism so that the valve body section moves in a movement range in which the valve body surface and the valve seat surface maintain a non-contact state, wherein a channel cross-sectional area of the communication channel is smaller than each of a channel cross-sectional area of the inflow channel and a channel cross-sectional area of the outflow channel.