Noncontact Probe for Pattern Electrode Testing
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Solution Overview
Problem
Existing methods for detecting open and short circuits in pattern electrodes require multiple probes and operators, leading to increased costs, time, and risk of contact errors and damage to the electrodes.
Innovation Solution
A noncontact single side probe device with an exciter and sensor electrode as a single module applies AC power to one end of the pattern electrodes and measures electrical variations, using a pair of exciter and sensor electrodes with opposite phases to improve spatial resolution and signal-to-noise ratio.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If contact type probes are used to measure pattern electrodes, then measurement can be performed, but contact errors and scratches on electrodes occur
Solution Approach 1:
The patent replaces the mechanical contact probe system with a non-contact measurement system. The measurement probe generates an electromagnetic field that couples with the pattern electrode without physical contact, eliminating contact errors and scratches while maintaining measurement capability.
Solution Approach 2:
The patent introduces an electromagnetic field as an intermediary between the measurement probe and the pattern electrode. The electromagnetic field serves as a mediator that transfers energy and information without requiring direct physical contact, thus avoiding damage to the electrode surface.
2Reliability
If multiple probes and operators are used to detect open and short circuits, then detection can be performed, but cost and operation time increase
Solution Approach 1:
The patent combines multiple measurement functions into a single integrated probe system. The measurement probe can detect both open circuits and short circuits by analyzing changes in electromagnetic field coupling, eliminating the need for multiple separate probes and operators.
Solution Approach 2:
The measurement probe is designed with universal functionality to detect various types of defects (open circuits, short circuits) by monitoring electromagnetic field variations. This multi-functional design replaces multiple specialized probes and reduces the number of operators needed.
3Productivity
If single side probe device is used to scan pattern electrodes, then operation time is reduced, but spatial resolution and signal-to-noise ratio may deteriorate
Solution Approach 1:
The patent optimizes the frequency and power parameters of the electromagnetic field generated by the measurement probe. By adjusting these parameters, the system achieves both high productivity through single-side scanning and high measurement precision through improved signal characteristics and reduced noise.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient detection of open and short circuits by scanning one end of the pattern electrodes, reducing the risk of contact errors and electrode damage, while improving sensitivity and accuracy through differential voltage measurement.
Implementation Method 1
a noncontact probe electrode which feeds power to a pattern electrode to be tested in a noncontact state and senses an electrical variation value
Data Source
AI summary
Disclosed herein are a noncontact single side probe and an apparatus and method for testing open and short circuits of pattern electrodes. By feeding power to one end of each of the pattern electrodes and sensing an electrical variation value using a noncontact type single side probe device including an exciter electrode and a sensor electrode as a single module, the open and short circuits of pattern electrodes can be tested by one scanning process. Since the open and short circuits of the pattern electrodes are tested using the noncontact type single side probe device, the pattern electrode can be prevented from being damaged due to a contact failure or pressurized contact and the life span of the probe device can increase compared with a contact type probe device.


