Non-Contact Roll Seal for Low-Particle Substrate Cleaning

The patent replaces the mechanical contact-type seal with a non-contact seal that uses a gas curtain (air bearing) to prevent cleaning liquid infiltration. The gas supply holes introduce compressed gas between the transmission shaft and housing, creating a pressure barrier that seals the gap without physical contact, thereby eliminating rotational resistance and particle generation from seal contact while maintaining effective sealing.

The patent applies pneumatic principles by using compressed gas flowing through gas supply holes to create a gas curtain that acts as a non-contact seal. The gas pressure prevents cleaning liquid from infiltrating along the transmission shaft, achieving sealing functionality through fluid pressure rather than mechanical contact.

The patent eliminates the mechanical contact seal that generates abrasive powder by substituting it with a non-contact gas curtain seal. The compressed gas flowing through the gas supply holes creates a pressure barrier that prevents cleaning liquid infiltration without physical contact, thereby preventing the generation of abrasive particles that could adhere to the substrate and cause defects.

The patent introduces compressed gas as an intermediary substance between the transmission shaft and housing to achieve sealing. The gas acts as a mediator that prevents direct contact between the shaft and housing, eliminating the generation of abrasive powder while maintaining the sealing function to prevent cleaning liquid infiltration.