Noncontact Substrate Support for High-Speed Lithography Positioning

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Solution Overview

Problem

The increasing size and weight of substrates in lithography processes for manufacturing electronic devices, such as liquid crystal display devices and semiconductor devices, have made it difficult to achieve high-speed and high-accuracy positioning control in exposure apparatuses, particularly in step-and-scan methods.

Innovation Solution

The exposure apparatus employs a noncontact support system with a first support section and a holding section, allowing for relative movement between the object and the illumination light, enabling precise positioning and scanning exposure across multiple areas without overlapping, using a combination of drive sections to manage the object's movement in various directions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of moving object

If the substrate size is increased to accommodate larger display devices, then the manufacturing capability is improved, but the positioning control difficulty increases due to increased weight

Engineering Contradiction:

Improvesubstrate areaVSAvoidpositioning control

Core Design Contradiction:

Area of moving objectVSEase of operation

Solution Approach 1:

The support function is segmented between a first support section (providing noncontact support for substrate areas) and a holding section (providing mechanical holding). This segmentation allows the heavy substrate to be supported without contact while only the holding section needs to be driven, reducing the effective moving mass for positioning control.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The first support section replaces traditional mechanical contact support with noncontact support (likely using air bearings or magnetic levitation). This substitution eliminates friction and mechanical wear, enabling smoother and more precise positioning control of large substrates.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Area of moving object

If the substrate holder size and weight increase to support larger substrates, then the substrate support capability is improved, but the positioning speed and accuracy deteriorate

Engineering Contradiction:

Improvesubstrate holder areaVSAvoidpositioning accuracy

Core Design Contradiction:

Area of moving objectVSManufacturing precision

Solution Approach 1:

The system separates the support function (first support section with noncontact support) from the holding and driving function (holding section). This allows the substrate holder to be large enough to support big substrates while the driven portion remains relatively small, maintaining positioning accuracy.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The first support section likely uses pneumatic air bearings to provide noncontact support. This allows large substrate areas to be supported without mechanical contact, preventing deformation and enabling high-precision positioning control.

Inventive Principle:

Principle #29Pneumatics and hydraulics

3Weight of moving object

If the substrate holder weight increases to support larger substrates, then the load capacity is improved, but the positioning speed deteriorates

Engineering Contradiction:

Improvesubstrate holder weightVSAvoidpositioning speed

Core Design Contradiction:

Weight of moving objectVSSpeed

Solution Approach 1:

The heavy substrate is separated from the driven component. The first support section supports the full weight of the large substrate noncontactually, while the holding section (which is driven) has reduced weight. This segmentation enables high positioning speed despite large substrate weight.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Noncontact support replaces mechanical contact support, eliminating friction forces that would oppose motion. This substitution significantly reduces the force required for positioning and increases positioning speed even with heavy substrates.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution improves the positioning accuracy and controllability of substrates during scanning exposure, reducing the risk of mechanical interference and enhancing the efficiency of pattern transfer in lithography processes, even with larger substrates.

Implementation Method 1

a first support section that supports, in a noncontact manner, a first area and at least a partial area of a second area of the plurality of areas

Methodology Applied

Scientific EffectAir bearing: Air Lubrication

Data Source

PatentUS10802407B2Exposure apparatus, exposure method, manufacturing method of flat-panel display, and device manufacturing method

Publication Date: 2020.10.13 NIKON CORP

AI summary

A substrate stage device of an exposure apparatus is equipped with: a noncontact holder that supports, in a noncontact manner, a first area and at least a partial area of a second area, of a substrate, the second area being arranged side by side with the first area in the Y-axis direction; a substrate carrier that holds the substrate held in a noncontact manner by the noncontact holder, at a position not overlapping the noncontact holder in the X-axis direction; Y linear actuators and Y voice coil motors that relatively move the substrate carrier with respect to the noncontact holder in the Y-axis direction; X voice coil motors that move the substrate carrier in the X-axis direction; and actuators that move the noncontact holder in the X-axis direction.