Noncontact Support Platform Blockage Detection via Flowmeter
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Solution Overview
Problem
The existing noncontact support platforms using pressure-vacuum stages face issues with detecting blockages in vacuum nozzles, which can disrupt the uniformity of the air cushion, affecting the distance between supported objects and the stage surface, and consequently impact measurement or process quality.
Innovation Solution
A noncontact support platform equipped with a plurality of pressure nozzles and vacuum nozzles, where each vacuum nozzle is connected to a vacuum manifold via separate hoses, each with a flowmeter to detect blockages by analyzing inflow signals and generating responses when blockages are indicated, using flowmeters with pressure transducers to measure pressure differentials and compare them with threshold values.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If vacuum nozzles are used to create an air cushion for noncontact support, then the object can be supported at a fixed distance from the stage surface, but blockage of vacuum nozzles can occur which disrupts the uniformity of the air cushion and affects measurement quality
Solution Approach 1:
The system employs flowmeters connected to each vacuum nozzle to continuously monitor airflow and provide feedback signals to a controller. When blockage is detected through analyzed flow signals, the controller generates responses to maintain air cushion uniformity, resolving the contradiction between reliability and detection difficulty
Solution Approach 2:
The patent replaces direct mechanical inspection of nozzle blockage with a flow-based detection system using flowmeters and pressure transducers. This substitution enables non-contact, automated detection of blockages, improving both reliability and detectability
2Difficulty of detecting and measuring
If separate hoses with flowmeters are connected to each vacuum nozzle for blockage detection, then blockage can be effectively detected, but the device complexity increases
Solution Approach 1:
The system divides the vacuum system into individual nozzle units, each with its own hose and flowmeter. This segmentation enables independent monitoring of each nozzle, making blockage detection feasible while allowing modular configuration that can adapt to different numbers of nozzles
Solution Approach 2:
The flowmeters and controller are designed to serve multiple functions: monitoring airflow, detecting blockages, and providing feedback for maintaining air cushion uniformity. This multi-functionality reduces the need for separate dedicated components for each function
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively detects blockages in vacuum nozzles, ensuring the uniformity of the air cushion and maintaining the desired distance between objects and the stage surface, thereby enhancing the quality of measurements or processes.
Implementation Method 1
using flowmeters with pressure transducers to measure pressure differentials and compare them with threshold values
Implementation Method 2
The vacuum nozzles are connected to a vacuum source such that air is sucked into the PV stage via the vacuum nozzles
Implementation Method 3
The pressure nozzles are connected a pressure source so as to cause an outflow of air from the PV stage
Implementation Method 4
The outflow and inflow may create a fluidic spring effect that resists any change in distance between the object and the surface of the stage
Data Source
AI summary
A noncontact support platform includes a plurality of pressure nozzles on an outer surface of a PV stage of the noncontact support platform. The pressure nozzles connected to a pressure source for creating an outflow of fluid through the pressure nozzles. A plurality of vacuum nozzles are interspersed with the pressure nozzles on the outer surface and are connected to a vacuum manifold via one or a plurality of hoses to create an inflow of the fluid through the vacuum nozzles. At least one flowmeter is configured to generate a signal that is indicative of a measured inflow via at least one hose of the hoses. A controller is configured to analyze the signal to determine whether the measured inflow is indicative of blockage of a vacuum nozzle and to generate a response when blockage is indicated.