Nonlinear Coolant Deflectors for Sputtering Target Cooling

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Solution Overview

Problem

Conventional sputtering target cooling systems face inefficiencies due to limited coolant flow and high pressure issues, leading to water leakage, target damage, and misalignment, particularly in multi-component designs with complex bonding techniques.

Innovation Solution

The use of nonlinear coolant deflectors between the sputtering target and backing plate, which direct coolant flow efficiently across the target surface, reducing pressure requirements and minimizing mechanical attachments, allowing for lower defect rates and easier assembly.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If conventional water cooling systems are used with narrow channels in the backing plate, then cooling capacity is provided, but water flow is limited and high pressure is required leading to leakage and target damage

Engineering Contradiction:

Improvetarget coolingVSAvoidwater leakage and target damage

Core Design Contradiction:

TemperatureVSReliability

Solution Approach 1:

The patent uses curved or arced deflectors instead of straight channels to direct coolant flow. These curved surfaces redirect the water flow in a nonlinear path across the target-backing plate interface, improving cooling effectiveness while operating at lower pressures to prevent leakage and target damage.

Inventive Principle:

Principle #14Spheroidality (Curvature)

Solution Approach 2:

The backing plate is segmented into multiple regions with multiple deflectors positioned at different locations. Each deflector handles a specific portion of the coolant flow, distributing the cooling load and allowing the system to operate reliably at lower pressures while maintaining effective target cooling.

Inventive Principle:

Principle #1Segmentation

2Strength

If multi-component designs with bonding techniques are used to attach target to backing plate, then mechanical support is provided, but misalignment and bond failure occur due to thermal expansion differences

Engineering Contradiction:

Improvetarget supportVSAvoidalignment and bond integrity

Core Design Contradiction:

StrengthVSManufacturing precision

Solution Approach 1:

The deflectors are designed to be self-aligning features that guide the target onto the backing plate during assembly. The curved surfaces provide mechanical guidance that ensures proper alignment without requiring precision bonding, allowing the assembly to self-correct minor misalignments and preventing bond failure from thermal expansion differences.

Inventive Principle:

Principle #25Self-service

3Temperature

If high pressure is used to force coolant through narrow channels, then cooling effectiveness is improved, but target deformation and water leakage increase

Engineering Contradiction:

Improvecooling efficiencyVSAvoidtarget deformation

Core Design Contradiction:

TemperatureVSObject-affected harmful factors

Solution Approach 1:

The curved deflectors create a nonlinear flow path that increases the residence time of coolant at the target interface without requiring high pressure. The geometry of the curved surfaces naturally directs flow across hot spots, providing effective cooling at lower pressures to prevent target deformation and leakage.

Inventive Principle:

Principle #14Spheroidality (Curvature)

Solution Approach 2:

Instead of relying on pressure to drive flow through narrow one-dimensional channels, the patent uses two-dimensional curved surfaces to redirect flow. This dimensional approach allows coolant to follow arced paths across the interface, improving cooling coverage while maintaining lower operating pressures.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances cooling efficiency, decreases coolant leakage, and prevents target warpage, enabling effective target cooling at lower pressures, thus improving the manufacturing cost-effectiveness and alignment of target assemblies.

Implementation Method 1

coolant flow efficiently across the target surface, reducing pressure requirements

Methodology Applied

Scientific EffectHeat transfer: Conduction (thermal)

Implementation Method 2

direct coolant flow efficiently across the target surface

Methodology Applied

Scientific EffectConvection: Convection

Data Source

PatentUS7691240B2Target assemblies, targets, backing plates, and methods of target cooling

Publication Date: 2010.04.06 SOLSTICE ADVANCED MATERIALS US INC

AI summary

The invention includes backing plates having coolant deflectors with at least a portion of each of the deflectors being nonlinear. Projections projecting from the backing plate are configured to insert into openings within a sputtering target. The invention includes targets having at least one opening to receive a fastener extending into the target through a back surface. The invention includes a target assembly having projections projecting from the backing plate and insertable within openings within the target. The invention includes a target assembly having a plurality of coolant deflectors disposed between the target and the backing plate. A segment of each of the deflectors is nonlinear. The invention includes methods of cooling a target. Coolant deflectors are disposed within a gap between the target and a backing plate with coolant deflectors being nonlinear along at least a portion of their length.