Nonlinear Ion Path Gating for Low-Noise Gas Analysis
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Solution Overview
Problem
Current gas analyzing apparatuses face challenges in reducing noise interference, particularly from plasma light, which affects the accuracy of ion detection in semiconductor processes, due to the difficulty in completely blocking stray light and the limited effectiveness of existing light shielding methods.
Innovation Solution
The apparatus employs a non-linear ion path to guide ions from the ionization device to the analyzer, combined with an energy filter that intermittently blocks and releases the ion flow using an electric or magnetic field, allowing for the acquisition of detection data with and without blocking, enabling the subtraction of noise components from the measurement results.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a non-linear ion path is used to guide ions from the ionization device to the analyzer, then the influence of stray light is suppressed, but it is impossible to completely block light, so part of the light generated during ionization can reach the analyzer and become a source of noise
Solution Approach 1:
The blocking device intermittently blocks and releases the ion flow in a periodic manner. During the blocking period, only background noise (including stray light) is measured. During the release period, both ion signal and background noise are measured. By subtracting the background measurement from the total measurement, the noise component is removed, achieving high-precision measurement.
Solution Approach 2:
The blocking device acts as an intermediary that selectively blocks ions while allowing light to pass through. This device enables separate measurement of background noise (when ions are blocked) and total signal (when ions are allowed), facilitating noise subtraction to improve measurement precision.
2Measurement precision
If light shielding performance is enhanced to reduce noise, then the accuracy of analysis is improved, but the device complexity increases
Solution Approach 1:
Instead of using complex mechanical light shielding structures, the invention uses an electric or magnetic field-based blocking device to control ion flow. This substitution simplifies the physical structure while achieving the same noise reduction effect through field-based selective blocking and periodic measurement.
Solution Approach 2:
The blocking device changes the electric or magnetic field parameters to intermittently block and release ion flow. By controlling field strength and timing, the system achieves noise separation without requiring complex physical shielding structures, thus reducing device complexity while maintaining measurement precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces noise interference, resulting in highly accurate measurement results by suppressing the influence of stray light and improving the overall analysis precision, particularly in harsh semiconductor manufacturing environments.
Implementation Method 1
The ionization device may include a device that plasma-ionizes the sample gas
Implementation Method 2
a blocking device that intermittently blocks and releases, using an electric field or a magnetic field, the ion flow
Implementation Method 3
a blocking device that intermittently blocks and releases, using an electric field or a magnetic field, the ion flow
Data Source
AI summary
A gas analyzing apparatus includes: an ionization device that generates an ion flow of a sample gas; an analyzer that analyzes the ion flow supplied from the ionization device; a first ion path that non-linearly guides the ion flow from the ionization device to an inlet of the analyzer; and a blocking device for intermittently blocking and releasing, using an electric field or a magnetic field, the ion flow on at least part of a path of the ion flow through the first ion path to a mass filter of the analyzer. It is possible to perform measurement in a state where the ion flow is blocked and measurement in a state where the ion flow is not blocked.