Nonlinear Electromechanical Resonator Mass Sensor

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Solution Overview

Problem

Conventional MEMS resonators face challenges in accurately detecting small mass perturbations due to nonlinear behavior and noise interference, which degrades measurement precision and reliability, especially when operating beyond critical amplitude thresholds.

Innovation Solution

A method and device that utilize nonlinear amplitude response by exciting resonant mechanical elements at specific frequency bands, including a central frequency and varying frequencies within unstable and stable bands to detect perturbations, allowing for precise amplitude variation analysis and reinitialization to maintain measurement sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the resonator amplitude is increased beyond the critical threshold to improve measurement sensitivity, then the detection sensitivity is improved, but the vibration regime becomes nonlinear causing hysteresis phenomena that degrade measurement precision and reliability

Engineering Contradiction:
Improvedetection sensitivityVSAvoidmeasurement reliability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent applies dynamics by making the excitation frequency variable rather than fixed. The frequency is continuously adjusted based on the detected amplitude to track the peak of the resonance curve, allowing the system to adapt to nonlinear behavior and maintain optimal measurement conditions despite amplitude variations beyond the critical threshold.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent implements feedback by using the detected amplitude information to adjust the excitation frequency. The system continuously monitors the amplitude and modifies the frequency accordingly to follow the resonance peak, creating a closed-loop control that compensates for nonlinear effects and maintains measurement reliability even at high amplitudes.

Inventive Principle:
Principle #23Feedback

2Reliability

If the resonator amplitude is kept below the critical threshold to maintain linear vibration regime, then the measurement reliability is maintained, but the detection sensitivity is reduced

Engineering Contradiction:
Improvemeasurement reliabilityVSAvoiddetection sensitivity
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The system dynamically adjusts the excitation frequency to track the resonance peak, enabling operation at amplitudes beyond the critical threshold while maintaining measurement quality. This dynamic adaptation allows the system to exploit the enhanced sensitivity of nonlinear regime without sacrificing reliability.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the operating parameters by allowing amplitude to exceed the critical threshold and compensating through frequency adjustment. Instead of constraining the amplitude to remain below the critical value, the system changes the frequency parameter dynamically to maintain optimal measurement conditions in the nonlinear regime.

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If conventional frequency shift measurement is used to detect small mass perturbations, then the measurement method is simple, but the frequency shift becomes very small and difficult to distinguish from measurement noise

Engineering Contradiction:
Improvemeasurement method simplicityVSAvoidfrequency shift detectability
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent exploits mechanical vibration by operating the resonator in a nonlinear amplitude regime and detecting amplitude variations rather than frequency shifts. This approach converts the measurement from frequency domain to amplitude domain, where the nonlinear effects produce larger, more detectable signals that exceed the noise floor while maintaining methodological simplicity.

Inventive Principle:
Principle #18Mechanical vibration

Solution Approach 2:

The patent converts the harmful nonlinear hysteresis phenomena into a beneficial measurement mechanism. Instead of avoiding nonlinear operation, the system exploits the amplitude variations and hysteresis loop characteristics in the nonlinear regime to achieve enhanced detection sensitivity, turning what was previously a source of error into a useful signal.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances the detection sensitivity and precision of mass perturbations by leveraging nonlinear behavior, enabling reliable measurement of small mass variations and particle detection while ensuring accurate reinitialization of the resonator state.

Implementation Method 1

exciting the resonant mechanical element to vibrate in a domain of nonlinear amplitude response at a vibration frequency Ω

Methodology Applied
Scientific EffectNonlinear vibration: Vibration

Implementation Method 2

excitation of the resonant mechanical element making it possible to cause the resonant mechanical element to vibrate

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 3

detection and analysis of the variations of amplitude of vibrations of the mechanical element

Methodology Applied
Scientific EffectAmplitude detection:

Data Source

PatentUS10119856B2Method for detecting a perturbation by hysteretic cycle using a nonlinear electromechanical resonator and device using the method
Publication Date: 2018.11.06 ECOLE NAT TRAVAUX PUBLICS DE LETAT
  • US10119856B2 patent drawing
  • US10119856B2 patent drawing
  • US10119856B2 patent drawing

AI summary

A method is provided for detecting a perturbation with respect to an initial state, of a device including at least one resonant mechanical element exhibiting a physical parameter sensitive to a perturbation such that the said perturbation modifies the resonance frequency of the said resonant mechanical element. A device is provided for detecting a perturbation by hysteretic cycle having at least one electromechanical resonator with nonlinear behavior and means for actuation and detection of the reception signal via a transducer so as to analyze the response signal implementing the method. A mass sensor and a mass spectrometer using the device are also provided.