Broadband Light Source Assembly Using Normal Dispersion Fiber

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Known broadband light source assemblies suffer from high levels of relative intensity noise (RIN) in the white light generated, making them unsuitable for certain applications such as achieving the required on-product overlay (OPO) with precision.

Innovation Solution

A broadband light source assembly comprising a femtosecond pump laser emitting pulses of radiation with an energy per pump pulse of greater than 50 nJ, and an all-normal dispersion optical fiber that receives these pulses, resulting in full conversion into broadband radiation with reduced RIN.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If a broadband light source assembly uses modulation instability (MI) based whitelight generation, then broadband radiation is generated, but the relative intensity noise (RIN) becomes too high for precision applications

Engineering Contradiction:
Improvebroadband radiation generationVSAvoidrelative intensity noise level
Core Design Contradiction:
Illumination intensityVSReliability

Solution Approach 1:

The patent changes the dispersion parameter of the optical fiber from anomalous dispersion (used in MI-based sources) to normal dispersion. This parameter change fundamentally alters the whitelight generation mechanism from modulation instability to self-phase modulation, thereby reducing RIN while maintaining broadband radiation generation capability

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

Instead of using the conventional approach of generating whitelight through modulation instability in anomalously dispersive fibers, the patent inverts the approach by using normal dispersion fibers and self-phase modulation. This inversion of the generation mechanism resolves the RIN problem while achieving the same broadband output

Inventive Principle:
Principle #13The other way round (Inversion)

2Measurement precision

If higher power spectral density is achieved in broadband radiation, then application precision improves, but relative intensity noise increases

Engineering Contradiction:
Improveon-product overlay precisionVSAvoidrelative intensity noise
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

By changing the dispersion parameter to normal and adjusting the pump pulse energy to greater than 50 nJ, the patent achieves a favorable operating point where high power spectral density is obtained through efficient self-phase modulation while keeping RIN below 10^-5 [Hz^-1/2], satisfying precision measurement requirements

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed solution achieves lower levels of relative intensity noise (RIN < 10^-5 [Hz^-1/2]) in the generated radiation, enhancing the precision of applications like on-product overlay (OPO) and allowing for higher power spectral density in the broadband radiation.

Implementation Method 1

Spectral broadening of the input radiation may be dominated by modulation instability, self-phase modulation, or soliton dynamics

Methodology Applied
Scientific EffectSelf-phase modulation:

Implementation Method 2

Spectral broadening of the input radiation may be dominated by modulation instability, self-phase modulation, or soliton dynamics

Methodology Applied
Scientific EffectSoliton dynamics: Soliton

Implementation Method 3

an all-normal dispersion optical fiber arranged to receive the pulses of radiation

Methodology Applied
Scientific EffectNormal dispersion: Dispersion (of waves)

Data Source

PatentEP4538786A1Broadband light source assembly
Publication Date: 2025.04.16 ASML NETHERLANDS BV
  • EP4538786A1 patent drawingFigure 1
  • EP4538786A1 patent drawingFigure 2~3
  • EP4538786A1 patent drawingFigure 4~5

AI summary

A broadband light source assembly comprising: a femtosecond pump laser arranged to emit pulses of radiation, wherein the pulses of radiation have an energy per pump pulse of greater than 50 nJ; and an all-normal dispersion optical fiber arranged to receive the pulses of radiation.