Notched Waveguide Cores for Enhanced Photonic Sensor Sensitivity

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing photonic chips with ring resonators lack improved structures and methods for enhancing sensitivity and performance in sensing applications, particularly in photonic sensors.

Innovation Solution

The introduction of notched side edges and projections in the waveguide core and ring resonator structures, formed through lithography and etching processes, to enhance interaction with the evanescent field and improve sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If notched side edges are introduced in the waveguide core, then sensitivity of photonic sensors is improved, but device complexity increases

Engineering Contradiction:
ImprovesensitivityVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The waveguide core is segmented by introducing notches in the side edges, dividing the continuous structure into sections. This segmentation increases the interaction between the evanescent field and the surrounding medium, thereby improving sensitivity while maintaining a manageable structural complexity through systematic patterning.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The notches are strategically positioned at specific locations along the waveguide core to create localized regions of enhanced field interaction. This local modification allows sensitivity enhancement in specific areas without requiring complex modifications throughout the entire device structure.

Inventive Principle:
Principle #3Local quality

2Reliability

If notched side edges and projections are formed through lithography and etching, then sensing performance is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvesensing performanceVSAvoidmanufacturing complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The notched side edges and projections are formed during the preliminary lithography and etching processes, integrating the sensing-enhancing features into the standard fabrication sequence. This preliminary action ensures that the complex structures can be manufactured using existing photonic chip fabrication techniques without requiring additional specialized steps.

Inventive Principle:
Principle #10Preliminary action

3Measurement precision

If the waveguide core is modified with notches, then interaction with evanescent field is enhanced, but structural simplicity is reduced

Engineering Contradiction:
Improveinteraction strengthVSAvoidstructural simplicity
Core Design Contradiction:
Measurement precisionVSShape

Solution Approach 1:

The notches introduce vertical dimensionality to the otherwise two-dimensional waveguide core structure. By creating depth variations through the notches, the structure enhances evanescent field interaction without requiring complex lateral modifications, thus balancing structural complexity with functional enhancement.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The modified structures enhance the sensitivity and performance of photonic sensors by accurately detecting shifts in resonant wavelengths due to material interaction, improving biosensing capabilities.

Implementation Method 1

The presence of a material in the environment surrounding the ring resonator may interact with the evanescent field of the light circulating in the ring resonator and change the resonant wavelengths

Methodology Applied
Scientific EffectEvanescent field interaction:

Implementation Method 2

A ring resonator is a photonic device that is characterized by a circular waveguide core with a resonance condition in which specific wavelengths of light circulating in the circular waveguide core are captured

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentUS20250327970A1Photonic structures with one or more notched side edges
Publication Date: 2025.10.23 GLOBALFOUNDRIES US INC
  • US20250327970A1 patent drawing
  • US20250327970A1 patent drawing
  • US20250327970A1 patent drawing

AI summary

Structures for a photonic chip that include photonic device, such as a ring resonator, and methods of forming such structures. The structure comprises a waveguide core including a first section and a second section separated from the first section by a slot. The first section of the waveguide core includes a first side edge, a second side edge opposite from the first side edge, and a plurality of notches in the first side edge.