Nozzle Adjustment Device for Semiconductor Cleaning
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Solution Overview
Problem
In semiconductor production, axial angle deviations in nozzles of cleaning machines lead to inconsistent spraying angles and directions, resulting in non-uniform cleaning and incomplete removal of dust from substrates, affecting the quality of products like OLEDs and solar cell panels.
Innovation Solution
A nozzle adjustment device with an adjustment sheet, spray pipe positioning unit, and nozzle positioning unit, featuring rotating disc structures and threaded components, allows for simple alignment of nozzles to consistent angles and directions, ensuring uniform spraying.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If nozzles are mounted on a cleaning machine during production, then cleaning function is provided, but axial angle deviation occurs causing inconsistent spraying angles and directions
Solution Approach 1:
The patent applies preliminary action by providing a positioning structure with pre-defined angular positions and positioning holes before nozzle mounting. The positioning structure includes multiple positioning holes arranged at specific angles (0°, 45°, 90°, 135°, etc.) and positioning grooves that guide the nozzle assembly into the correct angular orientation, ensuring precise alignment is achieved in advance during assembly rather than requiring post-adjustment.
Solution Approach 2:
The positioning structure serves as an intermediary between the cleaning machine and the nozzle assembly. It includes a positioning plate with positioning holes and positioning grooves that mediate the connection, ensuring accurate angular positioning. The positioning structure translates the mounting requirement into a simple插孔-插销 (hole-pin) connection that automatically ensures correct angular orientation without requiring complex adjustment mechanisms.
2Ease of operation
If traditional mounting methods are used for nozzles, then installation is simple, but spraying angles and directions become inconsistent resulting in non-uniform cleaning
Solution Approach 1:
The positioning structure incorporates pre-defined angular positions and positioning features before the mounting process. The positioning plate has multiple positioning holes arranged at precise angles and positioning grooves that guide the nozzle assembly, so that when the nozzle is mounted, it automatically assumes the correct angular position without requiring complex adjustment operations.
Solution Approach 2:
The positioning structure is segmented into distinct functional elements: positioning holes for angular selection, positioning grooves for directional guidance, and fixing holes for secure mounting. This segmentation allows each element to perform its specific function independently, making the overall mounting process simple while ensuring precise angular positioning through the combination of these segmented features.
Data Source
AI summary
An adjustment device includes: an adjustment sheet; a spray pipe positioning unit, including spray pipe positioning holes and two spray pipe positioning bolts; and a nozzle positioning unit, including a nozzle positioning hole disposed at the center of the adjustment sheet and an angle fixing portion homocentrically disposed on a periphery of the nozzle positioning hole. The angle fixing portion is a rotating disc structure capable of homocentrically rotating relative to the adjustment sheet. Angle auxiliary scales are disposed on an edge of the angle fixing portion and the adjustment sheet at corresponding positions. Two symmetrical angle positioning holes and two symmetrical angle positioning bolts are further disposed on the angle fixing portion. When the angle positioning bolts are inserted into the angle positioning holes and are forced tight, an angle of the angle positioning portion relative to the adjustment sheet is fixed at a preset angle.