Integrated Nozzle Arm Alignment for Precise Substrate Edge Etching
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional substrate processing apparatuses face challenges in accurately etching the peripheral portions of substrates due to non-uniformity in the relative position of the nozzle with respect to the position adjusting device, leading to eccentric placement of substrates and inaccurate liquid discharge.
Innovation Solution
The substrate processing apparatus integrates a holder, nozzle arms, and position adjusting devices to accurately align the substrate on the holder, ensuring the nozzle can discharge processing liquid precisely to the peripheral areas by having the position adjusting device integrated with the nozzle arm, eliminating the need for separate arms and enhancing precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If separate arms are used for position adjustment and liquid discharge, then device complexity is reduced, but manufacturing precision deteriorates due to non-uniformity in relative position
Solution Approach 1:
The patent combines the position adjusting device and the liquid discharge nozzle into a single integrated nozzle arm assembly. This merging ensures that the relative position between the position adjusting device and nozzle remains constant, eliminating positioning errors that would occur with separate arms. The integrated design maintains high positioning accuracy while accepting increased structural complexity as a necessary trade-off.
2Manufacturing precision
If integrated nozzle arm with position adjusting device is used, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The position adjusting device and nozzle are merged into a single integrated arm, ensuring their relative position remains constant during movement. This integration directly improves liquid discharge accuracy by eliminating positioning errors that would occur with separate components, while the increased structural complexity is accepted as necessary for achieving the required precision.
Solution Approach 2:
The integrated nozzle arm performs multiple functions simultaneously: it adjusts the substrate position and discharges liquid precisely. This multi-functionality reduces the need for separate specialized components, improving overall system efficiency and accuracy while managing complexity through functional integration.
Data Source
AI summary
A substrate processing apparatus includes a holder, a nozzle arm and a position adjusting device. The holder is configured to hold a substrate. The nozzle arm has a nozzle configured to supply a processing liquid to a peripheral portion of the substrate. The position adjusting device is provided at the nozzle arm and is configured to adjust a position of the substrate to a given position on the holder.