Nozzle Array Deposition for Flexible Display Uniformity

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Solution Overview

Problem

Current methods for manufacturing display apparatuses face challenges in efficiently depositing materials onto flexible display substrates, particularly in achieving uniform thickness and mixing ratios of deposition materials, which affects the quality and efficiency of the display manufacturing process.

Innovation Solution

The apparatus includes a chamber with a deposition source, a nozzle head, and a substrate fixer, where deposition materials are vaporized or sublimated and simultaneously sprayed onto the substrate using a nozzle head with adjustable temperature and flow control, and a substrate fixer with temperature adjustment, allowing for precise control of deposition thickness and mixing ratios.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional deposition methods are used, then the manufacturing process is simple, but the deposition uniformity and mixing ratio control are poor

Engineering Contradiction:
Improvedeposition uniformityVSAvoidapparatus structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The deposition source is divided into multiple independent nozzles arranged in an array, with each nozzle capable of independent control. This segmentation allows precise control over material deposition at different locations, achieving uniform thickness and mixing ratios across the entire substrate surface while maintaining a manageable system architecture

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system incorporates dynamic control mechanisms including adjustable nozzle positions, variable deposition rates, and real-time mixing ratio control. The substrate can be moved relative to the nozzle array, and deposition parameters can be adjusted during the process to maintain precision across large areas

Inventive Principle:
Principle #15Dynamics

2Productivity

If conventional deposition methods are used, then the apparatus is simple, but the manufacturing efficiency is low

Engineering Contradiction:
Improvemanufacturing efficiencyVSAvoidapparatus structure
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

Multiple deposition nozzles are combined into a single array structure that can deposit materials simultaneously across the entire substrate width. This merging of multiple deposition functions into one integrated apparatus dramatically increases manufacturing efficiency by processing the entire substrate in a single pass rather than requiring multiple sequential operations

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The system enables continuous deposition across the entire substrate surface through the array of nozzles operating simultaneously. The substrate can be continuously fed through the deposition chamber while materials are deposited uniformly across its surface, eliminating idle time between processing different areas and maintaining continuous productive action

Inventive Principle:
Principle #20Continuity of useful action

3Manufacturing precision

If material is deposited onto the edge portion, then coverage is complete, but edge precision deteriorates due to deposition on surrounding structures

Engineering Contradiction:
Improveedge precisionVSAvoiddeposition coverage area
Core Design Contradiction:
Manufacturing precisionVSArea of stationary object

Solution Approach 1:

The deposition system applies different conditions to different areas of the substrate. The nozzle array is positioned and controlled to optimize deposition parameters specifically for the active display area while minimizing material deposition on edge portions and surrounding structures. This local optimization maintains high edge precision while ensuring complete coverage of the functional area

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables rapid and uniform deposition of materials onto the entire surface of flexible display substrates, improving manufacturing efficiency and quality by allowing real-time adjustment of deposition thickness and mixing ratios, thus producing high-quality display apparatuses.

Implementation Method 1

at least one deposition source, outside the chamber, to vaporize or sublimate a deposition material

Methodology Applied
Scientific EffectVaporization: Evaporation

Implementation Method 2

at least one deposition source, outside the chamber, to vaporize or sublimate a deposition material

Methodology Applied
Scientific EffectSublimation: Sublimation

Implementation Method 3

a nozzle head in the chamber and connected to the at least one deposition source, the nozzle head to simultaneously spray the deposition material onto an entire surface of a display substrate

Methodology Applied
Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Implementation Method 4

a deposition preventer in the chamber surrounding an edge portion of the nozzle head and an edge portion of the substrate fixer, the deposition preventer to be heated during a deposition process

Methodology Applied
Scientific EffectThermal protection: Heating

Data Source

PatentUS11534790B2Apparatus and method of manufacturing display apparatus
Publication Date: 2022.12.27 SAMSUNG DISPLAY CO LTD
  • US11534790B2 patent drawing
  • US11534790B2 patent drawing
  • US11534790B2 patent drawing

AI summary

An apparatus for manufacturing a display apparatus includes a deposition source, a nozzle head, a substrate fixer, and a deposition preventer. The deposition source is outside the chamber and vaporizes or sublimates a deposition material. The nozzle head is in the chamber, is connected to the at least one deposition source, and simultaneously sprays the deposition material onto an entire surface of a display substrate. The substrate fixer is connected to the chamber and moves linearly, with the display apparatus is mounted on the substrate fixer. The deposition preventer is in the chamber surrounding an edge portion of the nozzle head and an edge portion of the substrate fixer. The deposition preventer is heated during a deposition process.