Nozzle Array for Flexible Display Encapsulation

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Solution Overview

Problem

The challenge in manufacturing bendable or flexible display apparatuses is to effectively encapsulate the display unit using thin films, ensuring the longevity of the display apparatus while maintaining the flexibility of the display.

Innovation Solution

The proposed solution involves an apparatus with a chamber equipped with first and second nozzle units for depositing organic and inorganic layers alternately on a substrate. An injection nozzle unit injects a gas to clean and facilitate the deposition process, enhancing the encapsulation of the display unit.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If multiple thin films are stacked to encapsulate the display unit, then the lifespan and durability of the display apparatus is improved, but the structure becomes more complex and the manufacturing process becomes more difficult

Engineering Contradiction:
Improvelifespan of display apparatusVSAvoidstructure of encapsulation layers
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The encapsulation structure is segmented into multiple thin films with distinct functions: inorganic layers provide barrier properties against moisture and oxygen, while organic layers provide flexibility and stress relief. This segmentation allows each layer to optimize its specific function, achieving high reliability without requiring a single complex structure

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the encapsulation structure have different properties: inorganic layers are positioned where barrier performance is critical, while organic layers are positioned where flexibility is needed. This local differentiation of material properties allows the overall structure to achieve both durability and flexibility without unnecessary complexity

Inventive Principle:
Principle #3Local quality

2Reliability

If multiple thin films are stacked to encapsulate the display unit, then the durability is improved, but the manufacturing precision requirements increase

Engineering Contradiction:
Improvedurability of display apparatusVSAvoiddeposition accuracy of thin films
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The manufacturing process uses continuous deposition methods where inorganic and organic layers are alternately deposited in a sequence without breaking the vacuum environment. This continuous process reduces contamination risks and maintains consistent film quality, achieving high durability while managing manufacturing precision requirements

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The deposition process controls critical parameters such as film thickness, deposition rate, and chamber pressure to optimize layer quality. By precisely controlling these parameters during alternating deposition of inorganic and organic layers, the system achieves high manufacturing precision for each layer, ensuring overall encapsulation effectiveness

Inventive Principle:
Principle #35Parameter changes

3Productivity

If gas injection is used to clean the nozzle units, then the manufacturing efficiency is improved, but the device complexity increases

Engineering Contradiction:
Improvemanufacturing efficiencyVSAvoidnumber of nozzle units
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The injection nozzle unit serves multiple functions: it delivers source material for organic layer deposition, injects cleaning gas to prevent contamination, and maintains proper gas flow dynamics in the chamber. This multi-functionality improves manufacturing efficiency by eliminating the need for separate cleaning systems while managing device complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method improves the durability and efficiency of the display apparatus by sequentially stacking inorganic and organic layers, which enhances the encapsulation and extends the lifespan of the display unit while maintaining its flexibility.

Implementation Method 1

a first nozzle unit at the chamber, the first nozzle unit configured to deposit an organic layer or an inorganic layer on a substrate

Methodology Applied
Scientific EffectVapor deposition: Physical Vapour Deposition

Implementation Method 2

a second nozzle unit at the chamber, the second nozzle unit configured to deposit the organic layer or the inorganic layer on a substrate

Methodology Applied
Scientific EffectVapor deposition: Physical Vapour Deposition

Implementation Method 3

an injection nozzle unit between the first nozzle unit and the second nozzle unit, the injection nozzle unit configured to inject a first gas in the chamber toward the substrate

Methodology Applied
Scientific EffectGas flow cleaning: Fluid Spray

Data Source

PatentUS12207530B2Apparatus for manufacturing display apparatus and method of manufacturing display apparatus
Publication Date: 2025.01.21 SAMSUNG DISPLAY CO LTD
  • US12207530B2 patent drawing
  • US12207530B2 patent drawing
  • US12207530B2 patent drawing

AI summary

An apparatus and method for manufacturing a display apparatus includes: a chamber; a first nozzle unit at the chamber, the first nozzle unit configured to deposit an organic layer or an inorganic layer on a substrate; a second nozzle unit at the chamber, the second nozzle unit configured to deposit the organic layer or the inorganic layer on a substrate and the second nozzle unit being linearly aligned with the first nozzle unit in a first direction; and an injection nozzle unit between the first nozzle unit and the second nozzle unit, the injection nozzle unit configured to inject a first gas in the chamber toward the substrate.