Nozzle Array Spray Bar for Uniform Microelectronic Workpiece Treatment
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Solution Overview
Problem
Conventional microelectronic processing tools face challenges with fluid containment, thermal uniformity, and processing uniformity, including cross-contamination, complex design, and inefficient drying of barrier plates, as well as mist containment and reduced treatment effectiveness at the center of workpieces due to the Bernoulli effect.
Innovation Solution
The solution involves a separate low thermal mass spraying mechanism and a barrier plate with aspirating and wicking features for rapid drying, a venturi-shaped pathway for mist containment, and a spray bar design that extends beyond the workpiece center to ensure uniform treatment, using aspirating and wicking techniques to dry the barrier plate and containing mists within the process chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single duct is used to capture treatment fluids, then the design is simple, but cross-contamination occurs between different treatment fluids
Solution Approach 1:
The patent divides the single duct into multiple separate ducts, each dedicated to capturing a specific treatment fluid. This segmentation prevents cross-contamination between different fluids while maintaining manageable system complexity through modular design
Solution Approach 2:
The patent employs nested duct structures where multiple ducts are positioned concentrically or in layered configurations. This nesting allows separate fluid capture pathways to coexist in a compact arrangement, preventing cross-contamination without excessive space requirements
2Reliability
If multiple stacked ducts are used to capture different treatment fluids, then cross-contamination is reduced, but the device complexity and packaging difficulty increase
Solution Approach 1:
Multiple ducts are arranged in a nested configuration where smaller ducts are positioned within or alongside larger ducts. This nesting strategy enables separate fluid capture for different treatment fluids while maintaining a compact overall structure that simplifies packaging and tool integration
Solution Approach 2:
The patent transitions from horizontal stacking of ducts to a vertical or radial arrangement in another dimension. This dimensional change allows multiple ducts to be positioned at different heights or radii, reducing spatial complexity while maintaining separate fluid capture capabilities
3Reliability
If a barrier plate is used to contain fluids, then fluid containment is improved, but thermal uniformity across the workpiece deteriorates due to heat blocking
Solution Approach 1:
The barrier plate is divided into multiple segmented sections with gaps or openings between them. This segmentation allows thermal energy to pass through the gaps while the plate segments maintain fluid containment, thereby preserving thermal uniformity across the workpiece
Solution Approach 2:
Different regions of the barrier plate have different properties: solid plate sections provide fluid containment while gaps or perforated sections allow thermal energy transmission. This local differentiation enables simultaneous achievement of fluid containment and thermal uniformity
4Manufacturing precision
If the spray bar is positioned to cover the workpiece radius, then the outer periphery is treated effectively, but the center region receives insufficient treatment due to the Bernoulli effect
Solution Approach 1:
The spray bar is designed with asymmetric nozzle distribution, placing more nozzles or larger nozzles toward the center region. This asymmetric configuration compensates for the Bernoulli effect that draws spray away from the center, ensuring uniform treatment across the entire workpiece surface
Solution Approach 2:
Instead of positioning nozzles to uniformly cover the radius, the spray bar extends beyond the workpiece center with nozzles oriented to direct spray inward toward the center region. This inverted approach counteracts the outward Bernoulli effect and achieves center region treatment
5Ease of operation
If the barrier plate structure is moved apart to open duct pathways, then fluid capture is enabled, but the device complexity and space requirements increase
Solution Approach 1:
Duct pathways are nested within the barrier plate structure itself, allowing fluid capture pathways to be integrated into the barrier plate without requiring additional external space. The ducts are positioned within the thickness or structural elements of the barrier plate
Solution Approach 2:
The barrier plate and duct structures are merged into a single integrated component. The duct pathways are formed as internal channels within the barrier plate, eliminating the need for separate moveable duct structures and reducing overall tool volume
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances fluid containment, thermal uniformity, and processing uniformity, reduces cycle time, and effectively treats the entire workpiece surface, including the center, by minimizing the Bernoulli effect impact.
Implementation Method 1
a venturi-shaped pathway for mist containment
Implementation Method 2
an aspirating pathway in fluid communication with the barrier structure in a manner effective to allow liquid on the lower surface to be aspiratingly withdrawn from the lower surface of the barrier plate
Implementation Method 3
a barrier plate with aspirating and wicking features for rapid drying
Data Source
AI summary
The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.