Nozzle with Branching Flow Channels for Droplet Control
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Solution Overview
Problem
Existing substrate processing nozzles face challenges in controlling the variation in size and speed of droplets, leading to non-uniform cleaning and potential damage to device patterns, while also requiring a compact design to fit within limited spaces.
Innovation Solution
A nozzle design featuring a main body with branching flow channels and piezo element-induced vibration, which controls droplet size and speed by adjusting pressure and vibration frequency, and is constructed from quartz for strength and chemical resistance, with a cover protecting electrical components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If a high pressure is applied to spray droplets from small holes, then the droplet speed is increased, but the nozzle size must be enlarged to withstand the pressure
Solution Approach 1:
The flow passage is divided into multiple branched flow channels, allowing the processing liquid to be distributed through separate paths. This segmentation enables the use of smaller individual channels that can withstand high pressure without requiring a large overall nozzle structure, thus maintaining compact size while achieving high droplet speed through efficient flow distribution
Solution Approach 2:
The invention transitions from a single linear flow path to a multi-dimensional branched channel structure. By arranging flow channels in multiple directions and levels within the nozzle body, the design achieves high pressure tolerance and efficient droplet ejection without increasing the external nozzle dimensions, effectively utilizing internal spatial arrangement
2Productivity
If a large number of droplets are sprayed, then the cleaning efficiency is improved, but the variation in droplet size and speed increases causing non-uniform cleaning
Solution Approach 1:
The processing liquid flow is divided into multiple independent branched channels, each producing droplets through controlled vibration. This segmentation ensures that each channel contributes a consistent number of uniform droplets, and the cumulative effect of multiple channels achieves high droplet count while maintaining overall uniformity in size and speed distribution
Solution Approach 2:
A piezoelectric element is integrated into the nozzle structure to apply high-frequency vibration to the processing liquid at the discharge ports. This mechanical vibration controls the droplet formation process, ensuring consistent droplet size and speed across all discharge ports while enabling a large number of droplets to be sprayed simultaneously for improved cleaning efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables uniform droplet distribution, effective cleaning of substrate surfaces, and prevents nozzle enlargement, ensuring efficient and reliable substrate processing while maintaining a compact form.
Implementation Method 1
The plurality of discharge ports are connected to the corresponding branch flow channels. A piezo element is mounted to the main body so as to apply vibration to the processing liquid flowing through the plurality of branch flow channels.
Implementation Method 2
a piezo element mounted to the tubular body... When an AC voltage is applied to the piezo element, vibration is applied to the processing liquid inside the tubular body
Data Source
AI summary
A nozzle for discharging droplets of a processing liquid for processing a substrate has a main body including a supply port, a drain port, a processing liquid flow passageway connecting the supply port and the drain port, and a plurality of discharge ports from which the processing liquid is discharged. The processing liquid flow passageway includes a plurality of branch flow channels, which branch out between the supply port and the drain port and collect together between the supply port and the drain port. The plurality of discharge ports form a plurality of columns respectively corresponding to the plurality of branch flow channels; and are aligned along and connected to the corresponding branch flow channels. A piezo element applies vibration to the processing liquid flowing through the plurality of branch flow channels.