Nozzle Cleaning Apparatus with Absorbing Member and Automated Discharge
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Solution Overview
Problem
Conventional rotary type photoresist coating apparatuses lack an automated cleaning mechanism for nozzle pollution, leading to labor-intensive manual cleaning and increased time consumption as photoresist accumulates at the nozzle outlet, causing pollution.
Innovation Solution
A nozzle cleaning apparatus utilizing an absorbing member with a lift and driving units for vertical and horizontal movement, combined with an absorbing member cleaning unit that uses a cleaning liquid to automatically remove and discharge pollutants, allowing for automated nozzle cleaning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual cleaning is used for nozzle pollution, then cleaning can be performed, but labor intensity and time consumption increase
Solution Approach 1:
The cleaning apparatus enables the nozzle to be cleaned automatically without manual intervention. The absorbing member is automatically moved into contact with the nozzle outlet, and the cleaning liquid is automatically supplied and discharged, allowing the system to service itself
Solution Approach 2:
The manual mechanical cleaning action is replaced by an automated system comprising a lift for vertical movement, a driving shaft for horizontal movement, and an automated cleaning liquid supply system with suction and discharge mechanisms
2Extent of automation
If automated cleaning mechanism is added, then cleaning efficiency improves, but device complexity increases
Solution Approach 1:
The cleaning apparatus integrates multiple functions into a single device: the lift and driving shaft mechanism serves both to position the absorbing member and to enable contact cleaning, while the same system handles both cleaning liquid supply and polluted liquid discharge through integrated suction and discharge pipes
Solution Approach 2:
The absorbing member acts as an intermediary between the cleaning liquid and the nozzle outlet. It receives the cleaning liquid, contacts the pollutant material, absorbs the polluted liquid, and transfers it to the discharge pipe, simplifying the overall system architecture through this mediating component
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus significantly reduces manual cleaning labor and time, enhancing productivity by enabling automatic and efficient removal of pollutants from the nozzle.
Implementation Method 1
a nozzle cleaning unit to clean the pollutant material from the nozzle by use of an absorbing member
Implementation Method 2
an absorbing member cleaning unit to clean a pollutant material from the absorbing member
Implementation Method 3
a suction pipe to remove and discharge a polluted cleaning liquid
Data Source
AI summary
Disclosed are an apparatus and a method for cleaning a nozzle, which can automatically clean pollutant of the nozzle. The nozzle cleaning apparatus comprises the nozzle in a polluted state, a nozzle cleaning unit to clean a pollutant material from the nozzle by use of an absorbing member, and an absorbing member cleaning unit to clean a pollutant material from the absorbing member. With this configuration, the nozzle cleaning apparatus can clean the polluted nozzle by use of the absorbing member and in turn, can clean the polluted absorbing member by use of cleaning liquid, whereby automatic cleaning of the nozzle can be accomplished. Automatic cleaning of the polluted nozzle has the effect of reducing cleaning labor and time, and improving productivity.


