Nozzle Cup Cleaning and Gas Drying for Blockage Prevention

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Solution Overview

Problem

Contaminants and residual treatment fluid on fluid discharging nozzles of substrate treatment apparatuses can cause quality failures and blockages, leading to inefficient substrate processing.

Innovation Solution

A cleaning apparatus with a cup structure that includes a cleaning liquid discharger and a drying gas discharger, which simultaneously cleans and dries the nozzles using deionized water and nitrogen gas, respectively, to remove contaminants and prevent blockages.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the fluid discharging nozzle is used continuously to discharge treatment fluid, then productivity is maintained, but contaminants accumulate on the nozzle causing quality failures and process interruptions

Engineering Contradiction:

Improvecontinuous processing capabilityVSAvoidnozzle functionality

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The system performs preliminary cleaning actions by accumulating cleaning liquid in the cup before the nozzle becomes severely contaminated. The cleaning liquid is discharged periodically to prevent contaminant buildup that would block the nozzle opening, thereby maintaining reliability without interrupting continuous productivity.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The nozzle cleaning system operates autonomously using the fluid discharging apparatus itself to clean the nozzle. The drying gas discharger uses the existing gas supply system to dry the nozzle after cleaning, eliminating the need for separate cleaning equipment and maintaining continuous operation.

Inventive Principle:

Principle #25Self-service

2Reliability

If cleaning liquid is discharged to remove contaminants, then nozzle cleanliness is improved, but residual liquid remains on the nozzle causing potential contamination

Engineering Contradiction:

Improvenozzle cleanlinessVSAvoidresidual fluid contamination

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The system immediately follows the cleaning liquid discharge with a drying gas discharge phase, creating a continuous action sequence without interruption. This ensures that as soon as cleaning liquid removes contaminants, drying gas begins removing residual liquid, preventing any window where residual fluid could cause contamination.

Inventive Principle:

Principle #20Continuity of useful action

Solution Approach 2:

The drying gas discharger extracts residual cleaning liquid from the nozzle surface by evaporating it. This separates the cleaning function (removing contaminants) from the drying function (removing residual liquid), ensuring both objectives are achieved without residual contamination.

Inventive Principle:

Principle #2Taking out (Extraction)

3Reliability

If the nozzle is cleaned frequently to maintain cleanliness, then contaminant removal is improved, but processing time is reduced due to cleaning interruptions

Engineering Contradiction:

Improvenozzle cleanlinessVSAvoidprocessing time

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The system implements periodic cleaning cycles where cleaning liquid is discharged at predetermined intervals during normal operation. This periodic maintenance removes contaminants before they accumulate to blocking levels, maintaining nozzle cleanliness while minimizing interruptions to overall processing time compared to frequent complete cleanings.

Inventive Principle:

Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively removes contaminants and dries the nozzles, ensuring continuous and efficient substrate treatment operations by preventing nozzle blockages and maintaining process quality.

Implementation Method 1

a cleaning liquid discharger configured to discharge the cleaning liquid to the fluid discharging nozzle

Methodology Applied

Scientific EffectLiquid flow:

Implementation Method 2

a drying gas discharger configured to discharge a drying gas for drying the fluid discharging nozzle after the discharge of the cleaning liquid ends

Methodology Applied

Scientific EffectEvaporation: Evaporation

Data Source

PatentUS12599923B2Apparatus and method for cleaning fluid discharging nozzle

Publication Date: 2026.04.14 ZEUS

AI summary

A fluid discharging nozzle cleaning apparatus includes: a cup in which an inner space, an upper opening which is open to allow a fluid discharging nozzle to enter the inner space, and a lower opening through which a cleaning liquid is discharged from the inner space to an outside are formed; a cleaning liquid discharger configured to discharge the cleaning liquid to the fluid discharging nozzle in a state in which the fluid discharging nozzle is positioned in the inner space of the cup; and a drying gas discharger configured to discharge a drying gas for drying the fluid discharging nozzle after the discharge of the cleaning liquid ends.