Nozzle Driving Deviation Correction in Substrate Treatment
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Solution Overview
Problem
The nozzle driving deviation in substrate treatment apparatuses occurs due to eccentric loads and decreased lubrication over time, leading to non-uniform movement and increased process times, which reduces UPH (units processed per hour) and causes delays.
Innovation Solution
A substrate treatment apparatus with a nozzle driving unit that includes a nozzle driving cylinder, a control valve, an operation measurement sensor, and a control unit to feedback and correct the operation time of the nozzle driving cylinder by adjusting the air input flow rate through a proportional control valve, maintaining the operation within a reference time range.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of stationary object
If a nozzle driving cylinder is operated for a long period of time, then the nozzle can perform substrate treatment, but eccentric load and decreased lubrication occur causing non-uniform movement position and time
Solution Approach 1:
The patent implements a feedback mechanism where the actual operation time of the nozzle driving cylinder is measured by a sensor and fed back to a control unit. The control unit compares the actual operation time with a reference time and adjusts the air input flow rate accordingly to correct deviations in nozzle movement position and time, thereby maintaining precision over extended operation periods
Solution Approach 2:
The patent changes the air input flow rate parameter to the nozzle driving cylinder based on feedback from operation time measurement. By adjusting this parameter dynamically, the system compensates for eccentric load and lubrication degradation, maintaining uniform nozzle movement characteristics over long operation periods
2Reliability
If the nozzle driving cylinder operation time varies, then the system adapts to wear, but process time is delayed and UPH is reduced
Solution Approach 1:
The control unit continuously monitors the operation time of the nozzle driving cylinder and provides real-time feedback to adjust the air input flow rate. This feedback loop ensures that nozzle movement remains within reference time ranges, preventing process delays and maintaining high UPH while adapting to component wear over time
Solution Approach 2:
The system dynamically adjusts the air input flow rate to the nozzle driving cylinder based on real-time operation conditions. This dynamic adjustment allows the system to maintain optimal performance and productivity by compensating for wear and operational variations without requiring manual intervention or causing process delays
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces nozzle movement deviations between facilities, ensuring accurate movement speed and position of the nozzle, thereby maintaining UPH and preventing process delays.
Implementation Method 1
a proportional control valve configured to adjust an air flow rate input to the nozzle driving cylinder
Implementation Method 2
an air pressure valve configured to control an air input and an air discharge of the nozzle driving cylinder
Data Source
AI summary
Proposed are a substrate treatment apparatus and a substrate treatment method, and a technology capable of reducing a nozzle driving deviation between facilities by feedback a repetitive operation of a nozzle driving cylinder of the substrate treatment apparatus and by correcting an air input flow rate of the nozzle driving cylinder according to an error in the operation of the nozzle driving cylinder is provided.