Nozzle Imaging Alignment in Substrate Processing Equipment
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Solution Overview
Problem
Existing substrate processing systems face challenges in precisely imaging and inspecting the state of nozzles due to obstacles like the processing liquid supply nozzle and scattering prevention cup, which can lead to incomplete or obstructed imaging and reduced precision in nozzle state analysis.
Innovation Solution
A substrate processing apparatus that includes an inspection substrate with an imaging unit and a holder, where the imaging unit's position is adjusted to a predetermined imaging position by rotating the holder, allowing clear imaging of the nozzle without obstacles, and enabling precise analysis of the nozzle's posture, center position, and presence of abnormalities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the imaging device is disposed above the processing liquid supply nozzle and scattering prevention cup, then the imaging path is established, but the imaging is obstructed by the nozzle and cup causing incomplete imaging
Solution Approach 1:
The imaging unit is moved from a vertical imaging path (above the nozzle) to a horizontal imaging path (at the same level as the nozzle), by rotating the holder 180 degrees. This dimensional change eliminates the obstruction caused by the nozzle and scattering prevention cup, allowing clear imaging of the nozzle discharge state without interference.
2Measurement precision
If the holder rotates the inspection substrate to adjust imaging position, then clear imaging of nozzle is achieved, but the device complexity increases
Solution Approach 1:
The holder is given a dual function: it not only holds the substrate for processing but also serves as a rotation mechanism to position the imaging unit. By rotating the holder 180 degrees, the same hardware component enables both substrate processing and nozzle imaging functions, avoiding the need for separate positioning mechanisms and reducing overall device complexity.
3Device complexity
If the imaging unit is fixed above the nozzle, then the device structure is simple, but the imaging is blocked by the scattering prevention cup
Solution Approach 1:
The imaging system transitions from a static configuration (imaging unit fixed above the nozzle) to a dynamic configuration where the holder can be rotated. This dynamic adjustment allows the imaging unit to change its position relative to the nozzle, moving from an obstructed vertical path to an unobstructed horizontal path, thereby capturing complete nozzle state information without increasing structural complexity.
Data Source
AI summary
A substrate processing apparatus includes an inspection substrate including a base and an imaging unit disposed at the base; a holder configured to hold a substrate or the inspection substrate; a driving unit configured to rotate the holder; a processing liquid supply having a nozzle configured to discharge a processing liquid to the substrate held by the holder; and a controller. The controller is configured to perform: adjusting a position of the imaging unit with respect to the nozzle to a predetermined first imaging position by controlling the driving unit to rotate the holder in a state that the inspection substrate is held by the holder; and imaging, after the adjusting of the position of the imaging unit to the first imaging position, the nozzle at the first imaging position by controlling the imaging unit.