Nozzle Imaging Timing for Accurate Liquid Level Detection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current liquid processing apparatuses in semiconductor manufacturing face challenges in accurately detecting liquid levels and foreign matter within nozzles, leading to potential processing defects due to incorrect liquid levels or adhered droplets, which can result in suboptimal film thickness and drying issues.
Innovation Solution
A liquid processing apparatus equipped with a stage, nozzle, capturing part, and detector that captures images of the nozzle at different timings to detect liquid levels and foreign matter by analyzing brightness variations and vibrations, using superimposed image data to distinguish between liquid levels and potential stains or droplets.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If image data is captured during liquid supply to detect foreign matter, then detection timing is improved, but liquid level detection accuracy deteriorates due to liquid flow interference
Solution Approach 1:
The system captures images during periods when liquid supply is suspended (before, between, or after supply cycles) to detect liquid levels without flow interference. This preliminary detection is then used to predict or infer liquid levels during active supply periods, allowing foreign matter detection during liquid supply while maintaining accurate liquid level measurement through timing-separated operations.
2Productivity
If liquid supply is continuous to maintain processing efficiency, then productivity is improved, but liquid level detection accuracy deteriorates due to constant flow interference
Solution Approach 1:
The liquid supply system operates in periodic cycles with intermittent suspension periods. During these suspension periods, image capture for liquid level detection is performed without flow interference. The system alternates between supply and suspension phases, allowing continuous processing over time while providing periodic detection windows that maintain accuracy without significantly reducing overall productivity.
3Measurement precision
If multiple image capture timings are used to detect liquid levels, then detection accuracy is improved, but system complexity increases
Solution Approach 1:
The image capturing part serves multiple functions: it detects liquid levels during suspension periods, identifies foreign matter during supply periods, and provides data for both immediate and predictive analysis. This multi-functionality allows the system to achieve high detection accuracy through multiple capture timings while avoiding the need for separate dedicated systems for each function, thereby managing complexity through consolidated design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables precise detection of liquid levels and foreign matter, preventing processing abnormalities and ensuring consistent film formation by accurately determining the position and size of liquid levels and droplets, thereby enhancing the reliability of liquid processing operations.
Implementation Method 1
a capturing part configured to capture an image of the nozzle so as to acquire image data
Data Source
AI summary
There is provided a liquid processing apparatus comprising: a stage on which a substrate is placed; a nozzle configured to supply a processing liquid to the substrate placed on the stage and perform a processing on the substrate; a capturing part configured to capture an image of the nozzle so as to acquire image data; and a detector configured to detect a liquid level based on a plurality of the image data acquired by the capturing part at different timings within a period in which a supply of the processing liquid from the nozzle is not performed, wherein the liquid level is formed by the processing liquid or a liquid other than the processing liquid in a processing liquid flow path provided inside the nozzle.