Nozzle Optical Inspection for Real-Time Fluid Shape Detection
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Solution Overview
Problem
Current semiconductor manufacturing processes lack real-time monitoring capabilities to detect shape variations in liquid streams or mists emitted by nozzles, leading to potential operational inefficiencies and inconsistencies.
Innovation Solution
Integration of a light source and light sensor within the nozzle channel, utilizing Total Internal Reflection to confine light within the fluid, allowing for real-time detection of shape changes in both liquid streams and mists, and immediate cessation of nozzle operation when variations are detected.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If off-line high speed camera or video recorder is used to monitor liquid stream shape, then shape variation can be captured, but real-time detection and immediate intervention cannot be achieved
Solution Approach 1:
The patent replaces the mechanical/optical imaging system (high speed camera or video recorder) with an optical sensing system using light sources and photodetectors that directly detect liquid stream shape variations through light scattering or refraction changes, enabling real-time electrical signal-based detection without mechanical moving parts or complex imaging processing
Solution Approach 2:
The patent introduces light as an intermediary medium that interacts with the liquid stream to convey shape information. Light sources emit light through or near the liquid stream, and photodetectors detect changes in light intensity or pattern caused by shape variations, converting physical shape changes into real-time electrical signals for immediate processing
2Manufacturing precision
If continuous monitoring of liquid stream shape is implemented, then manufacturing precision can be maintained, but device complexity increases
Solution Approach 1:
The patent divides the monitoring function into multiple independent light detection zones along the liquid stream path, with separate photodetectors positioned at different locations. Each detector monitors a specific segment of the liquid stream, allowing localized shape variation detection without requiring a single complex comprehensive sensing system
Solution Approach 2:
The patent designs the light source and photodetector assembly to serve multiple functions: the same optical components can monitor different sections of the liquid stream by adjusting detector positions, and the system can detect various types of anomalies including shape variations, interruptions, and flow rate changes using the same basic sensing mechanism
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables real-time monitoring and immediate intervention during fluid application processes, ensuring consistent and efficient semiconductor manufacturing by detecting shape changes and stopping the nozzle operation when abnormalities occur.
Implementation Method 1
Integration of a light source and light sensor within the nozzle channel, utilizing Total Internal Reflection to confine light within the fluid
Data Source
AI summary
A semiconductor manufacturing system includes: a nozzle including a first channel that allows a fluid to flow through; a light source configured to emit light; and a light sensor configured to receive light, the light source and the light sensor being disposed within the first channel and opposite to each other. The semiconductor manufacturing system is configured to: emit light, by the light source, from within the nozzle toward a surface while the nozzle is dispensing the fluid; receive the light reflected from the surface by the light sensor, the emitted light and the reflected light adapted to be contained within the fluid; and examine a status of the reflected light. The emitted light and the reflected light propagate in a direction parallel to a longitudinal axis of the first channel.