Nozzle Plate Manufacturing via Dual-Sided Etching and Liquid Repellent Film
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Solution Overview
Problem
Current nozzle plate manufacturing methods for ink-jet systems face challenges in achieving high accuracy for nozzle length and diameter uniformity, leading to fluctuations in ink ejection characteristics and printing quality, particularly in high-resolution printing, where variations in nozzle length and diameter affect ejection states and surface deposition.
Innovation Solution
A manufacturing method involving a substrate with a large diameter portion and a smaller diameter portion, where the smaller diameter portion is formed using a base material with a lower etching rate than silicon, and a thin liquid repellent film is applied to minimize fluctuations in nozzle length and diameter, ensuring consistent ejection performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional etching methods are used to form nozzles, then manufacturing process is simple, but nozzle length and diameter uniformity cannot be achieved at high accuracy
Solution Approach 1:
The manufacturing process is divided into multiple sequential etching stages: first etching the large diameter portion from one surface, then etching the small diameter portion from the opposite surface. This segmentation allows independent control of each etching process, enabling high precision control of both nozzle length and diameter without requiring overly complex single-step processes.
Solution Approach 2:
The invention transitions from single-sided etching to dual-sided etching, utilizing both surfaces of the substrate. By etching the large diameter portion from one surface and the small diameter portion from the opposite surface, the process achieves precise control of three-dimensional nozzle geometry through two-dimensional processing approaches.
2Reliability
If nozzle length and diameter vary, then manufacturing is easier, but ink ejection characteristics become unstable
Solution Approach 1:
The dual-sided etching process provides inherent feedback control: the first etching creates the large diameter portion with controlled depth, then the second etching from the opposite surface continues to the desired total depth. The interaction between these two etching processes naturally regulates the final nozzle dimensions, ensuring consistent ejection characteristics across multiple nozzles.
Solution Approach 2:
The invention controls etching parameters (etching depth, etching rate, etching time) for each stage independently. By adjusting these parameters, the process achieves precise control over nozzle length and diameter, ensuring dimensional consistency that maintains stable ink ejection characteristics.
3Manufacturing precision
If liquid repellent treatment is not applied, then manufacturing process is simpler, but ink adhesion causes ejection direction deviation and size fluctuation
Solution Approach 1:
The liquid repellent treatment is applied as a preliminary surface modification step before final nozzle assembly. This preliminary action prevents ink adhesion issues from the outset, ensuring uniform droplet formation and ejection without requiring complex post-processing or adjustment mechanisms.
4Manufacturing precision
If high resolution printing is pursued, then printing quality improves, but requirements for nozzle precision increase leading to manufacturing difficulties
Solution Approach 1:
The manufacturing process is divided into multiple sequential etching stages: first etching the large diameter portion from one surface, then etching the small diameter portion from the opposite surface. This segmentation allows independent control of each etching process, enabling high precision control of both nozzle length and diameter without requiring overly complex single-step processes.
Solution Approach 2:
The invention transitions from single-sided etching to dual-sided etching, utilizing both surfaces of the substrate. By etching the large diameter portion from one surface and the small diameter portion from the opposite surface, the process achieves precise control of three-dimensional nozzle geometry through two-dimensional processing approaches.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method achieves precise control over nozzle length and diameter, stabilizing ink ejection and reducing fluctuations, thereby enhancing printing quality and maintaining consistent electric field intensity for accurate droplet deposition.
Implementation Method 1
a liquid repellent treatment on the side of the nozzle plate liquid ejection direction... forms a liquid repellent film on the edge surface of the liquid ejection head
Implementation Method 2
anisotropic dry etching is applied to the exposed portion of the silicon single crystal substrate surface exposed by the first and second open patterns
Implementation Method 3
in order to enhance adhesion of the above liquid repellent film, a technology is known in which an SiO2 film is formed between the nozzle forming member and the liquid repellent film
Data Source
AI summary
A manufacturing method of nozzle plate for liquid ejection head includes, providing a substrate having a first base material of Si and a second base material, of which the etching rate in Si anisotropic dry etching is lower then that of Si, provided on one side of the first base material, forming a film as a second etching mask on the surface of the second base material, forming a second etching mask pattern having a small-diameter opening shape in the second etching mask film, etching until the etching part is extended through the second base material, forming a film as a first etching mask film on the surface of the first base material, forming a first etching mask pattern having a large-diameter opening shape in the first etching mask film, and Si anisotropic dry etching until the etched part is extended through the first base material.