Nozzle Reciprocation Control for Substrate Processing
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Solution Overview
Problem
The existing substrate processing apparatus requires significant time to create recipe information for reciprocating operations, as it alternately inputs forward and backward route steps, which is inefficient.
Innovation Solution
A substrate processing apparatus with a controller that controls the nozzle's movement based on recipe information including positions, total time, and speed, allowing continuous reciprocation between predefined points, reducing the need for alternative inputting of steps and thereby decreasing the time required to create recipe information.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the reciprocating operation is implemented by alternately inputting forward route step and backward route step, then the nozzle can move between two arbitrary points, but the time required to create recipe information is significantly increased
Solution Approach 1:
The patent merges the forward route step and backward route step into a single step definition. Instead of requiring separate inputs for forward and backward movements, the system allows users to define one step with start position, end position, and total time, automatically generating the reciprocating operation. This combining of operations directly reduces the time and complexity of creating recipe information.
Solution Approach 2:
The system performs preliminary calculation and automatic generation of the backward route step based on the forward route step parameters. When a user defines a single step with total time and positions, the controller automatically calculates the timing and parameters for the reciprocating operation, eliminating the need for manual input of multiple steps and reducing setup time.
2Reliability
If multiple steps are inputted alternately for forward and backward movements, then precise control of nozzle movement is achieved, but the device complexity increases
Solution Approach 1:
The patent segments the reciprocating operation into a single logical step rather than requiring multiple sequential steps. By defining one step with start position, end position, and total time, the system automatically divides the movement into forward and backward segments internally, maintaining precise control while simplifying the user-facing interface and recipe structure.
Solution Approach 2:
The system performs self-service by automatically generating the complete reciprocating operation sequence from a single step definition. The controller automatically calculates timing, generates backward route parameters, and structures the movement sequence without requiring manual intervention, thereby reducing recipe complexity while maintaining control precision.
Data Source
AI summary
A substrate processing apparatus according to the present disclosure includes a holding unit, a nozzle, a driving unit, and a controller. The holding unit holds a substrate. The nozzle supplies a processing liquid to the substrate held on the holding unit. The driving unit moves the nozzle. The controller controls the driving unit, so as to move the nozzle while supplying the processing liquid to the substrate from the nozzle. Further, the controller controls the driving unit based on recipe information including step information including positions of first and second points above the substrate, total time for moving the nozzle between the first and second points, and a moving speed of the nozzle, so as to cause reciprocation of the nozzle.