Nozzle with Segmented Plates for Uniform Fine Bubble Spraying
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Solution Overview
Problem
Existing nozzles for generating fine bubbles in substrate processing suffer from non-uniform spraying due to uniform arrangements, leading to blank areas and uneven distribution of microbubbles on substrates.
Innovation Solution
A nozzle design featuring a hollow housing with multiple plates that partition the space into areas with inflow ports and through-holes, where the gas-dissolved liquid is pressurized and miniaturized through these plates before being discharged through a slit, ensuring uniform distribution of fine bubbles across the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If multiple cylindrical injection nozzles are arranged uniformly on a header body, then the nozzle structure is simple and easy to manufacture, but blank areas are generated between the nozzles and uniform spraying cannot be realized
Solution Approach 1:
The nozzle is segmented into multiple independent cylindrical injection nozzles arranged in a matrix pattern on the header body. Each nozzle operates independently to spray liquid containing fine bubbles, allowing the system to maintain structural simplicity while improving spray coverage through multiple distributed spray points rather than a single uniform nozzle
Solution Approach 2:
The injection nozzles are arranged in a matrix pattern with specific spacing and positioning to address local coverage gaps. This localized arrangement ensures that spray streams from adjacent nozzles overlap appropriately, eliminating blank areas between nozzles while maintaining the overall simplicity of the header body structure
2Device complexity
If a plurality of cylindrical injection nozzles is arranged on a header body, then the device complexity is low, but uniform spraying of liquid containing fine bubbles cannot be realized
Solution Approach 1:
The spraying function is segmented across multiple cylindrical injection nozzles distributed in a matrix pattern on the header body. This segmentation allows each nozzle to contribute to a portion of the overall spray pattern, achieving uniform fine bubble distribution across the substrate without requiring complex individual nozzle mechanisms
Solution Approach 2:
Multiple simple cylindrical injection nozzles are merged into a coordinated matrix arrangement on the header body. The combined spray patterns from all nozzles create a uniform distribution of fine bubbles across the substrate, achieving high precision coverage through the collective action of multiple simple components rather than a single complex nozzle
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the uniformity of fine bubble distribution on substrates, eliminating blank areas and ensuring consistent coverage, thereby improving the substrate cleaning process.
Implementation Method 1
a plurality of plates 21 to 23 are provided in the housing 17 and partitioning the housing into a plurality of spaces SP1 to SP4
Implementation Method 2
a lower face of the housing is provided with a slit 16 communicating with a lowermost space of the spaces partitioned by the plate
Data Source
AI summary
A nozzle for generating fine bubbles, the nozzle including: a hollow housing; and a plurality of plates provided in the housing and partitioning the housing into a plurality of spaces, wherein an upper face or a side face of the housing is provided with an inflow port into which a gas-dissolved liquid flows and which communicates with an uppermost space of the spaces partitioned by the plate, each of the plates is provided with a plurality of through-holes, and a lower face of the housing is provided with a slit communicating with a lowermost space of the spaces partitioned by the plate.