Integrated Nozzle Skimmer for High-Resolution Organic Vapor Jet Printing

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Solution Overview

Problem

Conventional organic vapor jet printing (OVJP) techniques face challenges in achieving high-resolution patterned organic thin films without the use of shadow masks, often requiring close nozzle-substrate distances and large amounts of carrier gas, leading to issues like overspray and loss of pixel definition.

Innovation Solution

The use of integrated nozzle/skimmer structures with monolithically integrated nozzles and skimmers, which produce a collimated beam of organic material, allowing for higher-resolution printing at larger working distances and reducing overspray by concentrating the organic flux relative to the carrier gas.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If conventional OVJP techniques are used without shadow masks, then device complexity is reduced, but manufacturing precision deteriorates due to loss of pixel definition

Engineering Contradiction:

Improveshadow mask requirementVSAvoidpixel definition

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The patent divides the single nozzle function into two separate components: a nozzle for delivering organic material and carrier gas, and a skimmer for collimating the flow. This segmentation allows the nozzle to operate without a shadow mask while the skimmer provides the necessary flow control to maintain pixel definition, resolving the contradiction between device simplicity and manufacturing precision

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The skimmer acts as an intermediary component between the nozzle and substrate. It mediates the organic material-carrying gas flow by collimating it, thereby maintaining pixel definition without requiring a shadow mask. This intermediary element enables both device simplicity and manufacturing precision to coexist

Inventive Principle:

Principle #24Intermediary (Mediator)

2Ease of operation

If nozzle-substrate distance is increased, then ease of operation is improved, but manufacturing precision deteriorates due to beam divergence

Engineering Contradiction:

Improveworking distanceVSAvoidpattern resolution

Core Design Contradiction:

Ease of operationVSManufacturing precision

Solution Approach 1:

The skimmer performs preliminary collimation of the organic material beam before it travels to the substrate. By pre-aligning and confining the beam flow at the skimmer location, the system maintains beam integrity over longer distances, enabling increased working distances without sacrificing pattern resolution

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent changes the flow parameters of the organic material-carrying gas by using the skimmer to create a collimated beam with reduced divergence. This parameter change in beam morphology allows the system to operate at larger nozzle-substrate distances while maintaining manufacturing precision

Inventive Principle:

Principle #35Parameter changes

3Productivity

If large amounts of carrier gas are used, then productivity is improved, but loss of substance increases due to overspray

Engineering Contradiction:

Improvedeposition rateVSAvoidoverspray

Core Design Contradiction:

ProductivityVSLoss of substance

Solution Approach 1:

The skimmer creates a localized region of high organic material concentration by collimating the beam, while the surrounding carrier gas flow is directed away from the substrate. This local quality differentiation allows efficient deposition where needed while minimizing overspray and material loss in surrounding areas

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The patent converts the potentially harmful effect of excess carrier gas (which causes overspray) into a beneficial collimated flow. The skimmer redirects the carrier gas flow to support the organic material beam rather than allowing it to disperse, thereby maintaining productivity while reducing substance loss

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables high-resolution printing of patterned organic thin films without the need for shadow masks, maintaining resolution even at increased distances between the nozzle array and substrate, and reduces overspray by focusing the organic material beam.

Implementation Method 1

produce a collimated beam of organic material, allowing for higher-resolution printing at larger working distances and reducing overspray by concentrating the organic flux relative to the carrier gas

Methodology Applied

Scientific EffectCollimation:

Implementation Method 2

Each nozzle is in fluid communication with a carrier gas source and an organic material source and is configured to eject the organic material and carrier gas toward a substrate

Methodology Applied

Scientific EffectGas flow transport:

Data Source

PatentUS9178184B2Deposition of patterned organic thin films

Publication Date: 2015.11.03 UNIVERSAL DISPLAY CORP

AI summary

Embodiments disclosed herein provide devices having a nozzle die with one or more nozzles, each of which has one or more integrated skimmers. The use of an integrated nozzle/skimmer structure allows for higher-resolution printing in OVJP-type deposition techniques without requiring the use of a shadow mask by allowing for a relatively narrow organic material beam that can be placed at relatively high distances away from the substrate.