Nozzle Solidified Layer Removal for Coating Reliability

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Solution Overview

Problem

In substrate processing, solidified objects in nozzles can lead to chemical-solution coating failures and defects, reducing productivity, and periodic dispensing of chemical solutions increases waste.

Innovation Solution

A substrate processing apparatus with a control device that promotes solvent evaporation in the nozzle to form a solidified layer, which is then easily detached, preventing further solidification and maintaining solution concentration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the chemical solution is periodically dispensed through the nozzle to prevent solidified objects, then coating reliability is improved, but chemical solution waste increases

Engineering Contradiction:

Improvecoating reliabilityVSAvoidchemical solution waste

Core Design Contradiction:

ReliabilityVSLoss of substance

Solution Approach 1:

The invention extracts and removes the solidified layer from the nozzle through a take-out mechanism, preventing it from affecting subsequent coating operations. This allows the chemical solution to remain in the nozzle without forming harmful solidified objects that would compromise coating reliability, thereby eliminating the need for periodic dispensing and reducing chemical waste.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The invention performs preliminary removal of the solidified layer before it can affect the coating process. By proactively taking out the solidified layer through the take-out mechanism, the system prevents potential coating failures without requiring periodic dispensing of chemical solution, thus maintaining reliability while reducing waste.

Inventive Principle:

Principle #10Preliminary action

2Ease of operation

If the solvent evaporates in the nozzle when dispensing is stopped, then a solidified layer forms that can be removed, but coating failures occur if solidified objects are dispensed

Engineering Contradiction:

Improvenozzle cleanlinessVSAvoidcoating quality

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

The invention extracts the solidified layer from the nozzle using a take-out mechanism that removes the solidified layer before it can be dispensed onto the substrate. This prevents coating failures while maintaining the benefit of having a removable solidified layer for nozzle cleanliness.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The invention introduces a take-out mechanism as an intermediary between the nozzle and the substrate. This mechanism intercepts and removes the solidified layer that would otherwise be dispensed, preventing coating defects while allowing the solvent evaporation process to continue for maintaining nozzle cleanliness.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Productivity

If chemical solution remains in the nozzle during idle time, then productivity is improved by avoiding frequent dispensing, but solidified objects form in the nozzle

Engineering Contradiction:

Improvesubstrate processing efficiencyVSAvoidnozzle functionality

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The invention extracts the solidified layer that forms during idle time through the take-out mechanism. This allows the chemical solution to remain in the nozzle during idle periods, improving productivity by avoiding frequent dispensing operations, while the take-out mechanism ensures nozzle functionality is maintained by removing solidified objects.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The invention performs preliminary removal of solidified objects during idle time through the take-out mechanism. This enables the system to maintain chemical solution in the nozzle during idle periods for improved productivity, while proactively removing solidified objects to preserve nozzle functionality.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces coating failures, decreases contamination, and minimizes chemical solution waste, enhancing productivity and maintaining nozzle cleanliness.

Implementation Method 1

promotes evaporation of a solvent contained in the chemical solution remaining in the nozzle

Methodology Applied

Scientific EffectEvaporation: Evaporation

Data Source

PatentUS10290499B2Substrate processing apparatus and substrate processing method

Publication Date: 2019.05.14 KIOXIA CORP

AI summary

According to one embodiment, a substrate processing apparatus includes a nozzle and a control device. The nozzle dispenses a chemical solution onto a substrate. The control device controls a mechanism which promotes evaporation of a solvent contained in the chemical solution remaining in the nozzle to form a solidified layer in the nozzle. The solidified layer is obtained by solidifying components contained in the remaining chemical solution.