Nozzle Conveyance Standby Position for Pipe Durability

Solution Overview

Problem

Existing liquid processing apparatuses with shared nozzles face issues of pipe damage and reduced throughput due to sudden bending and twisting during nozzle conveyance, which are not adequately addressed by existing solutions.

Innovation Solution

A liquid processing apparatus with a nozzle placement region and an arm that pivots around a rear pivot axis, conveying nozzles to standby positions outside the substrate placement regions, reducing pipe deformation and enabling quicker nozzle movement to processing positions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the nozzle is conveyed directly from the nozzle placement region to the processing position, then the throughput is improved, but the pipe connected to the nozzle undergoes sudden bending and twisting causing damage

Engineering Contradiction:

ImprovethroughputVSAvoidpipe durability

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The nozzle is conveyed to a standby position in advance before the actual processing position, allowing the pipe to gradually adapt to the movement and avoid sudden bending. The standby position acts as an intermediate buffer zone that prepares the nozzle for the final positioning without causing abrupt pipe deformation.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The standby position serves as an intermediary location between the nozzle placement region and the processing position. By introducing this intermediate stopping point, the system allows the pipe to gradually adjust its configuration, reducing sudden stress and bending during nozzle conveyance.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Reliability

If the nozzle is conveyed slowly to avoid pipe damage, then the pipe durability is improved, but the throughput decreases

Engineering Contradiction:

Improvepipe durabilityVSAvoidthroughput

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The nozzle is conveyed to a standby position in advance before the actual processing position, allowing the pipe to gradually adapt to the movement and avoid sudden bending. The standby position acts as an intermediate buffer zone that prepares the nozzle for the final positioning without causing abrupt pipe deformation.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The nozzle conveyance is divided into periodic stages: first conveying to the standby position, then proceeding to the processing position. This staged approach allows the pipe to adjust gradually during each phase, reducing continuous stress while maintaining overall efficiency through structured movement patterns.

Inventive Principle:

Principle #19Periodic action

3Device complexity

If a shared nozzle is used for multiple cups, then the device complexity is reduced, but the nozzle must be frequently conveyed causing pipe bending

Engineering Contradiction:

Improveapparatus configurationVSAvoidpipe durability

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The standby position serves as an intermediary location between the nozzle placement region and the processing position. By introducing this intermediate stopping point, the system allows the pipe to gradually adjust its configuration, reducing sudden stress and bending during nozzle conveyance.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The nozzle is conveyed to a standby position in advance before the actual processing position, allowing the pipe to gradually adapt to the movement and avoid sudden bending. The standby position acts as an intermediate buffer zone that prepares the nozzle for the final positioning without causing abrupt pipe deformation.

Inventive Principle:

Principle #10Preliminary action

Data Source

PatentUS10643872B2Liquid processing apparatus, liquid processing method, and storage medium

Publication Date: 2020.05.05 TOKYO ELECTRON LTD

AI summary

Disclosed is a liquid processing apparatus including: a plurality of substrate placement regions; a nozzle that supplies a processing liquid to a substrate from each processing position; a nozzle placement region provided behind a row of the substrate placement regions; an arm that detachably holds the nozzle at one end side; a driving unit that horizontally pivots the arm around a pivot axis; and a controller that outputs a control signal to convey the nozzle from the nozzle placement region to a standby position corresponding to a processing position of a conveyance destination, cause the nozzle to stand by at the standby position, and then, convey the nozzle to the processing position. The standby position is outside the substrate placement regions and is located between the processing position and the nozzle placement region when viewed in a front-and-rear direction.