Nozzle Standby Chamber Geometry for High-Viscosity Solvent Layering
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Solution Overview
Problem
Conventional nozzle standby devices struggle to form a solvent layer in the leading end portion of nozzles when using high-viscosity resist liquids, such as those for 3D NAND memory, as the resist liquid attached to the nozzle inner wall is difficult to collect at the discharge opening, preventing effective solvent introduction.
Innovation Solution
The nozzle standby device incorporates a nozzle accommodation unit with a diameter reducing portion and solvent discharge opening, where the solvent forms a swirling flow, facilitating collection and maintaining the discharge opening closed with the solvent, even for high-viscosity liquids, by designing the inner circumferential surfaces to direct the solvent into the diameter reducing portion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional nozzle standby device is used, then the structure is simple, but the solvent layer cannot be effectively formed in the leading end portion of the nozzle when high-viscosity resist liquid is used
Solution Approach 1:
The nozzle accommodation unit is divided into an upper accommodation space and a lower diameter reducing portion, with the solvent discharge opening positioned in the diameter reducing portion. This segmentation allows the solvent to be discharged into a dedicated collection zone that directs flow toward the nozzle leading end, effectively solving the solvent layer formation problem while maintaining reasonable structural complexity
Solution Approach 2:
The solvent discharge opening is positioned at a different vertical level (lower dimension) than the nozzle leading end, with the diameter reducing portion creating a vertical flow path. This dimensional arrangement allows gravity to assist solvent flow from the discharge opening upward toward the nozzle, improving solvent layer formation without requiring complex horizontal positioning mechanisms
2Reliability
If the inner circumferential surface is made smooth for easy solvent flow, then the solvent can drain easily, but the solvent cannot be effectively collected and directed into the nozzle leading end
Solution Approach 1:
The diameter reducing portion has an asymmetric profile with a first inner circumferential surface at a first angle and a second inner circumferential surface at a second angle. This asymmetric geometry creates a directional flow path that guides the solvent along the surfaces and directs it toward the nozzle leading end, improving collection efficiency while maintaining controllable flow through the geometric design
3Reliability
If the solvent discharge opening is positioned higher, then the solvent can reach the nozzle more easily, but the solvent flow rate increases and cannot be controlled for proper liquid layer formation
Solution Approach 1:
The diameter reducing portion is designed to preliminarily collect and direct the solvent flow before it reaches the nozzle leading end. By positioning the solvent discharge opening lower and using the diameter reducing portion as an intermediate collection zone, the system preliminarily controls the solvent flow path and rate, ensuring that the solvent is introduced into the nozzle at the appropriate quantity for proper liquid layer formation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for the formation of a solvent layer in the nozzle, effectively preventing drying of the resist liquid and enabling efficient nozzle standby, even with high-viscosity processing liquids, by ensuring the solvent is easily collected and introduced into the nozzle.
Implementation Method 1
a discharged solvent is guided along the inner circumferential surface of the nozzle accommodation unit to be drained from the drain opening
Data Source
AI summary
A nozzle standby device configured to allow a nozzle to stand by therein includes a nozzle accommodation unit, having an inner circumferential surface formed to surround a leading end portion of the nozzle, provided with a drain opening facing a discharge opening of the nozzle; and a solvent discharge opening opened within the nozzle accommodation unit. The nozzle accommodation unit has a diameter reducing portion having a first and a second inner circumferential surfaces having different angles with respect to a center line of the nozzle accommodation unit such that an inner diameter of the diameter reducing portion becomes smaller toward the drain opening. An intersection point of two straight lines extending along two opposite portions of the first inner circumferential surface is located above the discharge opening of the nozzle when the leading end portion of the nozzle is placed in the diameter reducing portion.