Nozzle Suck-Back Layout for Drip-Free Liquid Injection
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Solution Overview
Problem
Existing liquid injection devices struggle to prevent fluid dripping and leakage at the nozzle outlet, especially when dealing with fluids of varying properties, due to limited suck back force from valves positioned far from the outlet, leading to process quality issues.
Innovation Solution
A liquid injection device with a nozzle, bypass passage, suck back passage, and control valve system that uses high-pressure gas to control a moving element between switch-on and switch-off positions, ensuring fluid is suctioned back through a suck back pump, and incorporates multiple pipeline sets for different fluids, including a water injection passage for clear water.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a suck back valve is installed in the fluid injection device, then fluid dripping is prevented, but the suck back force is limited due to the valve being far from the outlet end, causing remaining liquid to leak
Solution Approach 1:
The patent divides the suck back function into two separate components: a suck back valve disposed at the outlet end of the infusion pump and a suck back pump disposed at the outlet end of the pipeline. This segmentation allows the suck back pump to be positioned close to the outlet end, maximizing suck back force, while the suck back valve provides additional fluid cutoff. The two components work together to overcome the limitation of insufficient suck back force from a single valve location.
Solution Approach 2:
The patent introduces a bypass passage as an intermediary pathway that connects the outlet end of the pipeline to the suction port of the suck back pump. This bypass passage allows the suck back pump to directly access and suction remaining fluid from the pipeline outlet end, bypassing the need for fluid to travel back through the entire pipeline length, thereby significantly enhancing the suck back force and efficiency.
2Device complexity
If a suck back valve is installed at the outlet end of the infusion pump, then the device structure is simplified, but the suck back force is insufficient for complete fluid removal from the pipeline
Solution Approach 1:
The patent segments the fluid removal function into two distinct components: a suck back valve for initial fluid cutoff and a suck back pump for complete fluid removal. The suck back pump is specifically positioned at the outlet end of the pipeline to target and remove remaining fluid that the valve cannot fully evacuate. This segmentation ensures complete fluid removal while maintaining reasonable device structure through the use of standard pump and valve components.
Solution Approach 2:
The bypass passage serves as an intermediary pathway that enables the suck back pump to directly access the pipeline outlet end. This intermediary structure allows the pump to efficiently remove remaining fluid without requiring complex reconfiguration of the existing pipeline and valve system, thus achieving complete fluid removal with minimal increase in device complexity.
3Ease of operation
If the nozzle is moved during infusion, then substrate processing is enabled, but fluid dripping occurs due to insufficient suck back force
Solution Approach 1:
The patent segments the fluid control function into a suck back valve for immediate fluid cutoff and a suck back pump for complete fluid removal. When the nozzle needs to move during substrate processing, the suck back valve can immediately cutoff fluid flow, and the suck back pump can subsequently remove all remaining fluid from the pipeline, ensuring no dripping occurs during nozzle movement while maintaining full operational flexibility.
Solution Approach 2:
The bypass passage acts as an intermediary that enables rapid and complete fluid removal from the pipeline outlet end. When nozzle movement is required during processing, the suck back pump can quickly suction through the bypass passage to remove remaining fluid, preventing dripping while allowing the nozzle to move freely for substrate processing operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents fluid dripping and leakage by ensuring complete fluid removal, even when the nozzle is moving, and allows for the handling of diverse fluid properties and processes with improved process quality.
Implementation Method 1
Negative pressure for sucking the liquid injected from the injection nozzle through a suction port is produced by a suction unit and guided through a suction channel toward the suction port
Implementation Method 2
The control valve controls the moving element to switch between the switch-on position and the switch-off position to open or close the channel
Data Source
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AI summary
A liquid injection device includes a nozzle (10), a moving element (20) and a control valve (30). The nozzle (10) has a channel (11), a bypass passage (12) and a suck back passage (13). The channel (11) penetrates through the nozzle (10) for injecting a working fluid. The channel (11) has a liquid outlet (111). The bypass passage (12) has a first opening (121), a switch-on position (122) and a switch-off position (123). The suck back passage (13) has a second opening (131) between the first opening (121) and the liquid outlet (111). The first opening (121) and the second opening (131) communicate with the channel (11). The moving element (20) is disposed in the bypass passage (12). The control valve (30) is disposed on the nozzle (10) and controls the moving element (20) to switch between the switch-on position (122) and the switch-off position (123) to open or close the channel (11). A suck back pump (B) sucks the working fluid remaining between the first opening (121) and the liquid outlet (111) when the moving element (20) is located at the switch-off position (123).