Nozzle Suck-Back Valve Layout to Prevent Fluid Dripping
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Solution Overview
Problem
Existing liquid injection devices in the semiconductor field struggle to prevent fluid dripping and leakage at the nozzle outlet due to limited suck back force of valves installed far from the outlet, especially with fluids having varying properties like viscosity, density, temperature, and surface tension.
Innovation Solution
A liquid injection device with a nozzle, bypass passage, and suck back passage, controlled by a control valve and high-pressure gas, which switches between open and closed positions to prevent fluid dripping by using a moving element and suck back pump to remove residual fluid.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a suck back valve is installed at the outlet end of the fluid infusion pump, then the device structure is simple, but the suck back force is limited and remaining liquid causes dripping and leakage at the nozzle
Solution Approach 1:
The system is divided into multiple independent suction channels (first suction channel and second suction channel) with separate suction pumps (first suction pump and second suction pump). Each channel can operate independently to suction different fluids, allowing the system to handle multiple fluid types simultaneously without interference, thereby improving reliability while maintaining reasonable structural complexity
Solution Approach 2:
A switching valve is introduced as an intermediary component to control the flow direction and select which suction channel operates. This mediator allows the system to adaptively route fluids to appropriate channels based on fluid properties, ensuring effective suction without requiring complete redesign of the entire system architecture
2Device complexity
If the suck back valve is positioned far from the nozzle outlet, then the device structure is simple, but the remaining liquid in the pipeline causes dripping and leakage
Solution Approach 1:
The suction system is segmented into multiple channels, each with its own suction pump positioned close to the nozzle. This segmentation allows each pump to independently handle suction at critical locations near the nozzle outlet, effectively removing remaining liquid before it can drip or leak, while the overall structure remains manageable through modular design
Solution Approach 2:
The system transitions from a single centralized suction point to multiple distributed suction points along the pipeline. By adding the dimension of spatial distribution with multiple suction channels at different positions, the system effectively addresses liquid remaining at various locations, particularly near the nozzle outlet, without significantly complicating the overall device structure
3Device complexity
If a single suction channel is used, then the device structure is simple, but it cannot adapt to fluids with different fluid properties such as viscosity, density, temperature, volatility, and surface tension
Solution Approach 1:
The suction system is divided into multiple independent channels, each capable of handling different fluid types. This segmentation allows simultaneous or selective operation of different channels based on the specific fluid properties being processed, enabling the system to adapt to varying viscosity, density, temperature, volatility, and surface tension requirements without requiring complete system reconfiguration
Solution Approach 2:
The system incorporates dynamic control through switching valves that can redirect flow between different suction channels based on real-time fluid properties. This dynamic adaptability allows the system to optimize performance for different fluid types by selecting the appropriate channel, maintaining versatility while keeping the structural configuration relatively simple through shared common components
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents fluid dripping and leakage by ensuring complete fluid removal from the nozzle, even when moving, using a control valve and suck back pump system that adapts to different fluid properties.
Implementation Method 1
The suck back pump is connected to the suck back passage. The suck back pump sucks the working fluid remaining between the first opening and the liquid outlet when the moving element is located at the switch-off position.
Implementation Method 2
When the high-pressure gas enters the first chamber through the switch-on opening, the high-pressure gas pushes the separating plate to move the moving element to the switch-on position.
Implementation Method 3
the control valve includes an elastic element disposed in the second chamber, the elastic element elastically abuts against between the separating plate and an inner wall of the chamber. When the separating plate is not pushed by the high-pressure gas, the elastic element pushes the separating plate to move he moving element to the switch-off position.
Data Source
AI summary
A liquid injection device includes a nozzle, a moving element and a control valve. The nozzle has a channel, a bypass passage and a suck back passage. The channel penetrates through the nozzle for injecting a working fluid. The channel has a liquid outlet. The bypass passage has a first opening, a switch-on position and a switch-off position. The suck back passage has a second opening between the first opening and the liquid outlet. The first opening and the second opening communicate with the channel. The moving element is disposed in the bypass passage. The control valve is disposed on the nozzle and controls the moving element to switch between the switch-on position and the switch-off position to open or close the channel. A suck back pump sucks the working fluid remaining between the first opening and the liquid outlet when the moving element is located at the switch-off position.