Nozzle Thermal Expansion Differential for OLED Deposition Sealing
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Solution Overview
Problem
Existing deposition apparatuses for OLED manufacturing face challenges in maintaining a sealed gap between the nozzle and the crucible due to thermal expansion differences, leading to potential leaks and inefficiencies in material deposition.
Innovation Solution
A deposition apparatus with a nozzle design featuring a body part and a spray part made of different materials, where the spray part has a higher thermal expansion coefficient than the body part, and a coupling member with a lower thermal expansion coefficient is used to couple the spray part to the body part, ensuring a sealed interface during high-temperature operations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the nozzle is made of a single material, then the structure is simple and easy to manufacture, but the gap between the nozzle and crucible cannot be effectively sealed under high-temperature conditions due to thermal expansion differences
Solution Approach 1:
The nozzle is divided into multiple parts: a body part and a spray part made of different materials. The body part is made of a material with lower thermal expansion coefficient while the spray part is made of a material with higher thermal expansion coefficient. This segmentation allows each part to expand differently under heat, enabling the gap between the nozzle and crucible to be sealed effectively without requiring a completely complex redesign of the entire nozzle structure.
Solution Approach 2:
The nozzle uses composite construction by combining materials with different thermal expansion coefficients. The body part uses a material resistant to thermal shock (lower expansion), while the spray part uses a material that expands more under heat. This composite approach creates a differential expansion mechanism that seals the gap between the nozzle and crucible during high-temperature operation, improving sealing performance while maintaining reasonable structural simplicity.
2Reliability
If the spray part is made of a material with higher thermal expansion coefficient, then the gap sealing is improved under high temperature, but the material selection becomes more restricted and manufacturing complexity increases
Solution Approach 1:
By separating the nozzle into body part and spray part, the patent allows independent material selection for each segment. The spray part can use materials with higher thermal expansion coefficients (such as certain ceramics or metal alloys) specifically optimized for sealing, while the body part uses materials with lower expansion coefficients. This segmentation makes the manufacturing process more manageable despite the specialized material requirements.
Solution Approach 2:
The patent applies local quality by using different materials in different parts of the nozzle based on their specific functional requirements. The spray part, which directly contacts the crucible and requires gap sealing, uses materials with higher thermal expansion coefficients. The body part, which provides structural support, uses materials with lower expansion coefficients. This localized material optimization improves gap sealing while keeping the overall manufacturing process feasible through targeted material selection rather than requiring all parts to use specialized materials.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively seals the gap between the nozzle and the crucible, preventing material leaks and ensuring efficient deposition of organic light-emitting layers, thereby enhancing the manufacturing process for OLED devices.
Implementation Method 1
a thermal expansion coefficient of the spray part may be greater than a thermal expansion coefficient of the body part
Data Source
AI summary
A deposition apparatus includes a mask frame, a mask disposed on the mask frame, a crucible disposed below the mask frame, and a nozzle coupled to the crucible, and disposed between the crucible and the mask frame. The nozzle includes a body part including a coupling opening, and a spray part disposed in the coupling opening and including a hole overlapping the coupling opening. A thermal expansion coefficient of the spray part is greater than a thermal expansion coefficient of the body part.