Nozzle Tip Adapter Segmented Ducts for Drip Prevention
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Solution Overview
Problem
Existing substrate processing devices for nano- and microfabrication fail to completely prevent liquid from dripping onto the substrate after the dispense period due to air bubbles and other issues, despite reversing the flow to pull back excess liquid.
Innovation Solution
A nozzle tip adapter with a suction duct and a supply duct, where the suction duct is surrounded by the supply duct, merges close to the nozzle orifice to divert surplus liquid away, ensuring reliable drip prevention by forming a single piece with a projecting needle-shaped portion that extends into the nozzle tip recess.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If liquid flow is reversed to pull back excess liquid from the nozzle, then dripping is reduced, but dripping cannot be prevented completely due to air bubbles and other issues
Solution Approach 1:
The liquid path is segmented into two separate ducts: a supply duct for delivering liquid to the nozzle and a suction duct for removing excess liquid. This segmentation allows independent control of liquid delivery and removal, enabling complete drip prevention even in the presence of air bubbles that may block one duct while the other continues to function
Solution Approach 2:
The suction duct acts as an intermediary mechanism that actively removes excess liquid and air bubbles from the nozzle tip area. By introducing this intermediate removal path, the system can handle air bubbles and other impurities that would otherwise prevent complete drip prevention through simple flow reversal alone
2Reliability
If a single duct is used to supply liquid to the nozzle, then the structure is simple, but it cannot reliably prevent dripping after dispense period
Solution Approach 1:
The single duct is segmented into two separate ducts (supply duct and suction duct) with distinct functions. The supply duct delivers liquid while the suction duct removes excess liquid and air bubbles. This segmentation increases reliability of drip prevention while keeping each individual duct relatively simple in structure
Solution Approach 2:
The dual-duct system provides multi-functionality: the supply duct handles liquid delivery during dispense periods, while the suction duct handles both excess liquid removal during and after dispense periods, and air bubble evacuation. This multi-functional approach achieves reliable drip prevention without requiring complex additional components
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively prevents liquid from dripping onto the substrate by diverting all liquid between the orifice and the point of merge, ensuring controlled liquid management after the dispense period, enhancing the reliability of the nozzle tip adapter and nozzle assembly.
Implementation Method 1
a suction duct, a supply duct and a base body with a device end and a substrate end, wherein the suction duct and the supply duct are provided in the base body
Data Source
AI summary
A nozzle tip adapter has a suction duct, a supply duct, and a base body with a device end and a substrate end. The base body has a nozzle tip recess at its substrate end for receiving a nozzle tip and a projecting portion extending into the nozzle tip recess, wherein the suction duct extends through the projecting portion and the supply duct opens into the nozzle tip recess, wherein the suction duct is being at least partially surrounded by the supply duct. Further, a nozzle assembly and a nozzle are disclosed.