Nozzle Vacuum Generator Reduces Back Pressure
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Solution Overview
Problem
The semiconductor manufacturing industry faces challenges in achieving energy savings in vacuum pump systems due to insufficient dynamic energy in pipeline systems, often resulting in increased power consumption and costs when using auxiliary pumps and check valves.
Innovation Solution
A pressure difference generating apparatus comprising three pipes with specific geometries and flow rates, where a first fluid and a second fluid with different flow rates create a negative pressure, allowing the first fluid to enter a conical inlet runner and mix with the second fluid for discharge, reducing back pressure and enhancing dynamic energy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stress or pressure
If auxiliary pumps, check valves, or gas controllers are used to generate pressure difference, then the pressure difference effect is achieved, but power consumption and cost increase
Solution Approach 1:
The patent employs a nozzle-type vacuum generator that utilizes the vacuum pump's own suction force to generate the required pressure difference. The nozzle structure creates a low-pressure zone that automatically draws gas without requiring additional auxiliary pumps, check valves, or gas controllers, thereby achieving self-service operation and eliminating extra power consumption
Solution Approach 2:
The patent extracts and eliminates the need for auxiliary pressure difference generating devices (auxiliary pumps, check valves, gas controllers) by integrating the pressure difference generation function directly into the vacuum system through the nozzle-type vacuum generator, thereby removing the harmful factor of additional power consumption while maintaining the necessary pressure difference
2Stress or pressure
If auxiliary pumps and check valves are used to achieve pressure difference, then back pressure is avoided, but device complexity and cost increase
Solution Approach 1:
The patent merges the pressure difference generation function with the existing vacuum pump system by incorporating a nozzle-type vacuum generator into the pipeline. This integration combines the vacuum pumping function with the pressure difference generation function into a single system, eliminating the need for separate auxiliary pumps, check valves, and gas controllers, thereby reducing device complexity while avoiding back pressure
Solution Approach 2:
The nozzle-type vacuum generator serves multiple functions simultaneously: it generates the required pressure difference, prevents back pressure, and operates within the existing vacuum pump system. This multi-functionality eliminates the need for multiple specialized components, thereby reducing device complexity and cost
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively increases fluid dynamic energy in the pipeline, reduces back pressure and exhaust resistance, and achieves energy savings by utilizing the pressure difference generated between the fluids with varying flow rates.
Implementation Method 1
a negative pressure generated between the third conical outlet portion and the conical inlet runner has at least part of the first fluid to enter the conical inlet runner via the second inlet
Implementation Method 2
an inner diameter of the neck portion being less than an inner diameter of any of the second inlet and the second outlet, a conical inlet runner being formed between the second inlet and the neck portion, the conical inlet runner being parallel to the axis and tapered from the second inlet to the neck portion
Data Source
AI summary
A pressure difference generating apparatus includes a first pipe, a second pipe and a third pipe. The first pipe have a first inlet. The second pipe disposed inside of the first pipe has a conical inlet runner, a conical outlet runner and a neck portion between the conical inlet runner and outlet runner. The third pipe has a third conical outlet portion extending into the conical inlet runner. A first fluid and a second fluid flow into the first pipe and the third pipe separately in different flow rates. A negative pressure generated between the third conical outlet portion and the conical inlet runner allows at least part of the first fluid to flow into the conical inlet runner, then the neck portion, then the conical outlet runner, and finally out of the second pipe with the second fluid.