Nozzle Voltage Detection for Substrate Processing Liquid Control
Solution Overview
Problem
Existing substrate processing systems face challenges in efficiently and reliably detecting abnormalities in the processing liquid supply system, which can lead to unintended ejection of processing liquids during semiconductor device manufacturing, particularly when using sulfuric acid hydrogen peroxide mixtures.
Innovation Solution
Incorporating a conductive part for voltage application and a voltage detection part within the nozzle unit, with a non-conductive part interposed between them, allows for the detection of voltage changes to monitor the processing liquid's presence and correct retraction, preventing unintended ejection by using a voltage application part connected to the conductive part and a voltage detector installed in the detection part.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If voltage detection parts are directly connected to conductive parts for voltage application, then detection simplicity is improved, but reliability deteriorates due to risk of short circuit and unintended ejection
Solution Approach 1:
A non-conductive part is introduced as an intermediary between the conductive part for voltage application and the voltage detection part. This non-conductive part electrically isolates the two conductive components while allowing the detection part to still detect voltage changes through the processing liquid, thereby preventing short circuits while maintaining detection functionality.
2Device complexity
If processing liquid supply system lacks monitoring, then device complexity is reduced, but harmful factors increase due to unintended ejection
Solution Approach 1:
The voltage detection part continuously monitors the voltage state of the processing liquid and provides feedback to the control unit. When the processing liquid is not properly retracted or an abnormality is detected, the control unit receives this feedback and can immediately stop the ejection, preventing unintended ejection while maintaining relatively simple system architecture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables reliable detection of abnormalities in the processing liquid supply system, ensuring the processing liquid is correctly retracted and preventing accidental ejection, thus maintaining process integrity and preventing damage.
Implementation Method 1
a conductive part for voltage application configured to be brought into contact with the processing liquid
Implementation Method 2
a non-conductive part is interposed between the conductive part for voltage application and the voltage detection part
Data Source
AI summary
A substrate processing apparatus includes at least one nozzle unit configured to eject a processing liquid to a substrate. The at least one nozzle unit includes a conductive part for voltage application configured to be brought into contact with the processing liquid, and a voltage detection part or a current detection part configured to be brought into contact with the processing liquid. A non-conductive part is interposed between the conductive part for voltage application and the voltage detection part or between the conductive part for voltage application and the current detection part. A voltage application part is connected to the conductive part for voltage application, and a voltage detector is installed in the voltage detection part or a current detector is installed in the current detection part.