NV Nanodiamond Integration in CMOS Circuits for Single-Chip Quantum Sensing

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Solution Overview

Problem

Current technologies face challenges in manufacturing NV centers on silicon wafers, which are necessary for integrating quantum technology with conventional micro-electro-optical systems, due to the CMOS incompatibility of diamond layers with NV centers.

Innovation Solution

A method involving the use of nanodiamonds with NV centers, which are mixed with a carrier such as gelatin to form a colloidal solution, allowing for the targeted placement and assembly of these nanoparticles in CMOS microsystems without the need for microwave radiation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If diamond layers with NV centers are manufactured using conventional methods, then quantum sensing functionality is achieved, but the process is not CMOS compatible due to high temperatures involved

Engineering Contradiction:
Improvequantum sensing functionalityVSAvoidCMOS compatibility
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The invention segments the quantum sensing functionality into discrete nanodiamond particles containing NV centers, which can be independently manufactured and then integrated onto CMOS substrates. This separation allows the quantum功能 to be developed independently from CMOS process constraints, resolving the contradiction between maintaining quantum sensing reliability and achieving CMOS manufacturing compatibility.

Inventive Principle:
Principle #1Segmentation

2Productivity

If nanodiamonds are placed individually on CMOS wafers for targeted integration, then mass production and CMOS compatibility are enabled, but the crystal orientation becomes random causing spectral broadening

Engineering Contradiction:
Improvemass production capabilityVSAvoidcrystal orientation control
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The invention changes the operational parameters of the NV centers by applying specific magnetic field configurations and microwave pulse sequences that make the quantum sensing function independent of crystal orientation. This allows random-oriented nanodiamonds to still provide reliable quantum sensing, resolving the contradiction between mass production requirements and manufacturing precision.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If manual combination of macroscopic CVD diamond with NV centers is used, then functional integration is achieved, but the system is not compact and requires external components

Engineering Contradiction:
Improvefunctional integrationVSAvoidsystem compactness
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The invention embeds nanodiamond particles containing NV centers directly within the CMOS chip structure, nesting the quantum sensing functionality inside the existing microelectronic system. This eliminates the need for external macroscopic diamond components and complex external optical setups, achieving both functional integration and system compactness.

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the reliable production of compact single-chip quantum sensor systems based on NV centers, overcoming the limitations of existing methods and facilitating mass production.

Implementation Method 1

NV centers in diamond crystals are preferred today. These are optically controlled and read out.

Methodology Applied
Scientific EffectFluorescence: Fluorescence

Implementation Method 2

stir them with a carrier (TM), for example gelatin, for example in an aqueous solution or in a solution with another suitable solvent, or a similar suitable agent to a colloidal solution of these nanodiamonds in the carrier

Methodology Applied
Scientific EffectColloidal suspension: Colloid

Data Source

PatentUS12266735B2Device and method for using diamond nanocrystals having NV color centers in CMOS circuits
Publication Date: 2025.04.01 SAXONQ GMBH
  • US12266735B2 patent drawing
  • US12266735B2 patent drawing
  • US12266735B2 patent drawing

AI summary

A quantum-technological, micro-electro-optical or micro-electronic or photonic system includes a planar substrate of a direct or indirect semiconductor material. The system includes a microelectronic circuit including at least one transistor or diode. The system further includes a micro-optical subdevice and one or more nanoparticles, having one or more color centers. The surface of the of the planar substrate has a portion of a solidified colloidal film which is firmly bonded to the surface of the substrate. The portion of the solidified colloidal film includes the one or more nanoparticles. The system further includes a light-emitting electro-optical component. The light-emitting electro-optical component interacts optically with the micro-optical subdevice. The light-emitting electro-optical component interacts electrically and/or optically with the electrical component through the micro-optical subdevice. The interaction between the light-emitting electro-optical component and the electrical component takes place with an involvement of the color center or a plurality of color centers.