O-ring Fastening System for Ion Source Thermal Expansion
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Solution Overview
Problem
Existing fastening systems for ion sources and plasma chambers, which use metal springs to accommodate thermal expansion, lead to contamination issues due to reactive process gases attacking metallic components and depositing liberated materials on workpieces.
Innovation Solution
A fastening system utilizing O-rings to provide spring force, eliminating the need for metal components, where the O-rings are compressed by a pin and latch mechanism with a plurality of spokes or vertical slots to achieve the desired spring force, preventing contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If metal springs are used to accommodate thermal expansion, then the fastening system can maintain proper fastening force under thermal conditions, but metal contaminants are introduced that deposit on workpieces
Solution Approach 1:
The patent removes metal springs from the fastening system entirely, extracting the contaminating element while preserving the functional requirement for spring force through an alternative non-metallic mechanism using elastomeric O-rings and a latch assembly
Solution Approach 2:
The patent introduces an intermediary elastomeric O-ring mechanism between the latch and the components being fastened, which provides the necessary spring force without direct metal-to-metal contact that would generate contaminants
2Strength
If metal components are used in the fastening system, then the structure provides sufficient strength and durability, but reactive process gases attack the metal and liberate materials that coat surfaces
Solution Approach 1:
The patent changes the material parameter of the spring element from metal to elastomeric polymer, fundamentally altering the chemical properties to resist attack by reactive process gases while maintaining the mechanical function of providing spring force
Solution Approach 2:
The patent employs composite construction with the elastomeric O-ring providing flexibility and corrosion resistance, while the latch and holder provide structural strength, combining materials with complementary properties to achieve both strength and chemical inertness
3Object-generated harmful factors
If O-rings with spokes are used to provide spring force, then metal components are eliminated preventing contamination, but the device complexity increases with multiple components
Solution Approach 1:
The patent merges the spring function, the holding function, and the compression function into a single integrated elastomeric O-ring component that interacts with the latch and holder, reducing the number of separate parts needed compared to a traditional metal spring system
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The O-ring based fastening system effectively accommodates thermal expansion without introducing metal contaminants, providing a customizable spring force and reducing the risk of material deposition on workpieces, thus enhancing the cleanliness and reliability of ion source and plasma chamber operations.
Implementation Method 1
The O-ring may be compressed when the latch is locked in the groove
Data Source
AI summary
A fastening system for attaching two components with a spring force is disclosed. The fastening system utilizes O-rings to provide the spring force, eliminating the need for any metal components. The O-ring may be disposed in an O-ring holder that has a plurality of spokes. When compressed, indentations are created in the O-ring by the spokes. The number of spokes and their size and shape determine the spring force of the fastening system. In another embodiment, vertically oriented O-rings are utilized. The fastening system may be used to fasten various components of an ion source.