Compressed O-Ring Seals for Chemically Inert Fluid Sensing
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Solution Overview
Problem
Existing fluid sensing packages face issues with seals that inadequately adhere to semiconductor dies, are mechanically weak, not chemically inert, and cause ion absorption and out-diffusion, leading to inaccurate measurements and increased manufacturing costs.
Innovation Solution
The use of o-ring seals composed of chemically inert materials like PEEK or PTFE, which are compressed to form a robust, conformal seal around the sensor, preventing fluid ingress and ion absorption, and are compatible with existing technologies for cost-effective integration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional seals are used to seal around the sensor, then sealing is provided, but the seals inadequately adhere to semiconductor dies and are mechanically weak
Solution Approach 1:
The patent changes the material parameters of the seal from conventional materials to chemically inert materials such as PEEK or PTFE. These materials possess superior mechanical strength, adhesion properties, and chemical inertness, thereby resolving the contradiction between seal adhesion reliability and mechanical strength.
Solution Approach 2:
The patent employs composite sealing structures that integrate chemically inert materials with the semiconductor die assembly. This composite approach combines the sealing functionality with enhanced mechanical properties and chemical resistance, simultaneously improving both adhesion reliability and mechanical strength.
2Reliability
If conventional seals are used, then sealing is provided, but they are not chemically inert and cause ion absorption and out-diffusion
Solution Approach 1:
The patent applies the principle of inert environment by using chemically inert materials (PEEK or PTFE) for the seal. These materials do not react with or absorb ions from the fluid, eliminating ion absorption and out-diffusion issues that plague conventional seals, thereby ensuring measurement accuracy.
Solution Approach 2:
The patent changes the chemical composition parameters of the seal material to chemically inert substances. This parameter change eliminates harmful chemical interactions, preventing ion absorption and out-diffusion while maintaining sealing functionality.
3Measurement precision
If chemically inert materials like PEEK or PTFE are used for o-ring seals, then measurement accuracy is maintained, but manufacturing complexity increases
Solution Approach 1:
The patent makes the chemically inert seal material serve multiple functions: sealing, mechanical support, and chemical barrier. This multi-functionality reduces the need for additional components and simplifies the overall manufacturing process despite using specialized materials.
Solution Approach 2:
The patent changes the material parameters to chemically inert substances that maintain measurement accuracy while being compatible with existing manufacturing processes, thereby achieving precision without excessive complexity.
4Reliability
If o-ring seals are compressed to form a robust seal, then fluid ingress is prevented, but the seal may deform under temperature and pressure variations
Solution Approach 1:
The patent changes the material parameters of the seal to chemically inert materials with superior thermal and pressure resistance. These materials maintain their dimensional stability and sealing properties across a wide range of temperature and pressure conditions, preventing both fluid ingress and deformation.
Solution Approach 2:
The patent uses composite materials that combine the sealing function with thermal and pressure resistance properties, creating a robust seal that maintains both fluid tightness and dimensional stability under varying operating conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The o-ring seals provide a durable, chemically inert barrier that maintains measurement accuracy across temperature and pressure variations, reducing manufacturing costs and enhancing sensor longevity.
Implementation Method 1
an o-ring seal circumscribing a sensor. The o-ring seal prevents fluid ingress to portions of the package
Implementation Method 2
seals that inadequately adhere to semiconductor dies, are mechanically weak, not chemically inert, and cause ion absorption and out-diffusion
Data Source
AI summary
In some examples, a device comprises a substrate including a notch formed in a surface of the substrate and a semiconductor die positioned in the notch and including an electrochemical sensor on an active surface of the semiconductor die. The device also comprises a chemically inert member abutting the surface of the substrate and including an orifice in vertical alignment with the electrochemical sensor as a result of the semiconductor die being positioned in the notch. The device also comprises a compressed o-ring seal positioned between the chemically inert member and the active surface of the semiconductor die, the compressed o-ring seal circumscribing the electrochemical sensor.