Objective Lens Electrode Segmentation for Beam Landing Energy Control
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Solution Overview
Problem
Current charged particle optical devices face challenges in efficiently controlling the landing energy of electrons on a sample, which affects the inspection and measurement of micro and nano-scale defects in semiconductor manufacturing, leading to reduced throughput and yield.
Innovation Solution
A charged particle optical device is designed with a control lens array and an objective lens array, featuring an upper electrode and a lower electrode arrangement that allows for the variation and control of the landing energy of charged particle beams, maintaining focus at different energies by adjusting the potentials applied to the up-beam and down-beam electrodes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the landing energy of electrons is controlled using conventional methods, then the inspection precision is maintained, but the throughput is reduced due to inefficient energy control
Solution Approach 1:
The objective lens is segmented into multiple independent electrodes (upper electrode, up-beam electrode, down-beam electrode) that can be controlled separately. This segmentation allows independent adjustment of each electrode's potential, enabling efficient control of electron beam landing energy without requiring complex external control systems, thereby improving throughput while maintaining manageable device complexity
Solution Approach 2:
The control system enables dynamic adjustment of landing energy by varying the potentials of the up-beam and down-beam electrodes in real-time. This dynamic capability allows the device to optimize inspection parameters during operation, improving throughput by eliminating the need for manual reconfiguration or system shutdowns when energy adjustments are required
2Measurement precision
If the landing energy is varied to improve inspection capabilities, then the detection precision is enhanced, but the focus of the beam deteriorates at different energies
Solution Approach 1:
Different regions of the objective lens (represented by different electrodes) are assigned different potentials to achieve local optimization. The up-beam and down-beam electrodes can be adjusted independently to compensate for focus changes at different landing energies, ensuring that each region of the beam maintains optimal focus for its specific energy level, thus preserving both detection precision and focus quality
Solution Approach 2:
The system changes the electrical parameters (potentials) of the lens electrodes to adapt to different landing energy requirements. By adjusting the potential differences between electrodes, the system maintains beam focus across a range of landing energies, enabling varied inspection capabilities without sacrificing focus precision
3Device complexity
If a simple electrode configuration is used, then the device complexity is reduced, but the ability to control landing energy and maintain focus is insufficient
Solution Approach 1:
The objective lens electrode arrangement serves multiple functions simultaneously: it focuses the electron beam, controls the landing energy, and maintains focus across different energies. The same set of electrodes (upper, up-beam, down-beam) performs both focusing and energy adjustment tasks, eliminating the need for separate control mechanisms and achieving high adaptability without proportionally increasing device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the ability to detect and identify micro and nano-scale defects with improved resolution and efficiency, increasing the throughput of semiconductor manufacturing processes while maintaining focus across varying landing energies.
Implementation Method 1
the device being configured to apply an upper potential to the upper electrode, an up-beam potential to the up-beam electrode and a down-beam potential to the down-beam electrode, and being configured to control the up-beam potential and the down-beam potential to vary and/or set the landing energy of the beams on the sample
Implementation Method 2
an objective lens array configured to project the array of beams onto the sample, the objective lens array being down beam of the control lens and comprising: an upper electrode; and a lower electrode arrangement comprising an up-beam electrode and a down-beam electrode... to maintain focus of the beams on the sample at different landing energies
Data Source
AI summary
The present disclosure provides a charged particle optical device for a charged particle system. The device projects an array of charged particle beams towards a sample. The device comprises a control lens array to control a parameter of the array of beams; and an objective lens array to project the array of beams onto the sample, the objective lens array being down beam of the control lens. The objective lens array comprises: an upper electrode; and a lower electrode arrangement that comprises an up-beam electrode and a down-beam electrode. The device is configured to apply an upper potential to the upper electrode, an up-beam potential to the up-beam electrode and a down-beam potential to the down-beam electrode. The potentials are controlled to control the landing energy of the beams on the sample and. to maintain focus of the beams on the sample at the landing energies.