Objective Lens Isolator for Probe System Noise Reduction

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Solution Overview

Problem

Probe systems face challenges in maintaining low noise conditions during device under test (DUT) testing due to electromagnetic interference (EMI) and radiation, which affects the accuracy of measurements.

Innovation Solution

The implementation of a probe system with an imaging device featuring an objective lens isolator and an electrical grounding assembly that restricts electromagnetic noise, including an objective lens grounding conductor to connect the imaging device objective lens to the enclosure and ground, thereby isolating it from the imaging device body and reducing noise propagation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the imaging device objective lens is electrically connected to the imaging device body, then the structural support and optical alignment are maintained, but electromagnetic noise propagates from the imaging device body to the objective lens and into the enclosure volume

Engineering Contradiction:
Improvestructural supportVSAvoidelectromagnetic noise propagation
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent introduces an objective lens isolator as an intermediary component positioned between the imaging device body and the objective lens. This isolator serves as a mediator that breaks the direct electrical connection while maintaining optical alignment, thereby preventing electromagnetic noise propagation from the imaging device body to the objective lens and into the enclosure volume.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent segments the electrical connection path by inserting the objective lens isolator between the imaging device body and the objective lens. This segmentation divides the previously continuous electrical connection into separate sections, creating an electrical isolation barrier that prevents noise propagation while allowing optical signals to pass through.

Inventive Principle:
Principle #1Segmentation

2Measurement precision

If the imaging device body is positioned interior of the enclosure volume, then the optical imaging function is improved, but electromagnetic noise from the imaging device body interferes with the testing of devices under test

Engineering Contradiction:
Improveoptical imaging qualityVSAvoidelectromagnetic interference
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The objective lens isolator acts as a mediator that allows the imaging device body to be positioned interior of the enclosure volume for optimal optical imaging while preventing electromagnetic noise from reaching the devices under test. The isolator maintains the beneficial positioning while blocking the harmful electromagnetic interference.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Object-affected harmful factors

If an electrical connection is maintained between the imaging device objective lens and the enclosure ground, then electromagnetic noise is restricted, but the objective lens isolator adds structural complexity

Engineering Contradiction:
Improveelectromagnetic noise restrictionVSAvoidstructural complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The objective lens isolator is designed to perform multiple functions simultaneously: it provides electrical isolation to restrict electromagnetic noise, maintains optical alignment between the imaging device body and objective lens, and serves as a structural support element. By combining these functions into a single component, the patent reduces overall structural complexity while achieving noise restriction.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively minimizes electromagnetic noise within the enclosure volume, allowing for precise testing of DUTs by reducing interference and maintaining a low noise floor during the testing process.

Implementation Method 1

an objective lens isolator that at least partially electrically isolates the imaging device objective lens from the imaging device body

Methodology Applied
Scientific EffectElectrical isolation: Electrical Resistance

Implementation Method 2

an electrical grounding assembly configured to restrict electromagnetic noise from entering the enclosure volume

Methodology Applied
Scientific EffectElectromagnetic shielding: Faraday Cage

Implementation Method 3

an objective lens grounding conductor to connect the imaging device objective lens to the enclosure and ground

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS11874301B2Probe systems including imaging devices with objective lens isolators, and related methods
Publication Date: 2024.01.16 FORMFACTOR INC
  • US11874301B2 patent drawing
  • US11874301B2 patent drawing
  • US11874301B2 patent drawing

AI summary

Probe systems including imaging devices with objective lens isolators and related methods are disclosed herein. A probe system includes an enclosure with an enclosure volume for enclosing a substrate that includes one or more devices under test (DUTs), a testing assembly, and an imaging device. The imaging device includes an imaging device objective lens, an imaging device body, and an objective lens isolator. In examples, the probe system includes an electrical grounding assembly configured to restrict electromagnetic noise from entering the enclosure volume. In examples, methods of preparing the imaging device include assembling the imaging device such that the imaging device objective lens is at least partially electrically isolated from the imaging device body. In some examples, utilizing the probe system includes testing the one or more DUTs while restricting electrical noise from propagating from the imaging device to the substrate.