Oblique AZO Anode for Flexible OLED Transmittance

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Solution Overview

Problem

Current methods for manufacturing AZO/Ag/AZO electrodes lack low resistance and high transmittance, which are essential for replacing ITO in organic light emitting diodes, especially in flexible display technology.

Innovation Solution

A light emitting device with an anode structure formed by depositing particles obliquely to create a preferred orientation, comprising a first conductive layer, a metal layer, and a second conductive layer, along with a light emitting layer and cathode structure, to enhance transmittance and work function.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If ITO is used as the conductive oxide in organic light emitting diodes, then high transmittance and good electrical conductivity are achieved, but manufacturing cost increases and toxicity issues arise

Engineering Contradiction:
Improvetransmittance and electrical conductivityVSAvoidmanufacturing cost and environmental safety
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent changes the material parameter from ITO to AZO (aluminum-doped zinc oxide), which has similar electrical and optical properties but lower cost and non-toxicity. The doping concentration and deposition parameters are optimized to achieve ITO-level performance with AZO material.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent replaces expensive ITO with cheaper AZO material that can be manufactured at lower cost while maintaining required performance. AZO is non-toxic and environmentally friendly, eliminating the toxicity problem associated with ITO.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

2Ease of manufacture

If AZO/Ag/AZO electrode structure is adopted, then low cost and high transparency are achieved, but manufacturing method for low resistance and high carrier mobility has not been established

Engineering Contradiction:
Improvecost and transparencyVSAvoidresistance and carrier mobility
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent optimizes deposition parameters including oblique angle deposition, substrate temperature, and doping concentration to achieve low resistance and high carrier mobility in the AZO/Ag/AZO structure. The oblique deposition angle is a key parameter change that improves crystalline orientation and reduces resistance.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses a composite AZO/Ag/AZO structure where AZO provides transparency and corrosion resistance, Ag provides high electrical conductivity, and the combination achieves both low cost and low resistance. The composite structure leverages the advantages of each material.

Inventive Principle:
Principle #40Composite materials

3Device complexity

If particles are deposited vertically on the substrate, then simple deposition process is maintained, but preferred orientation and work function enhancement are not achieved

Engineering Contradiction:
Improvedeposition process complexityVSAvoidwork function and particle orientation
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent uses oblique angle deposition instead of vertical deposition, creating an asymmetric deposition geometry. This asymmetry induces preferred orientation of particles along the deposition direction and enhances work function while maintaining a relatively simple single-step deposition process.

Inventive Principle:
Principle #4Asymmetry

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution improves the transmittance and work function of the anode structure, addressing the need for low-cost, high-performance conductive oxides in display technology, particularly suitable for flexible displays.

Implementation Method 1

providing a substrate and a deposition source having particles to form functional film layers on a surface of the substrate

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Implementation Method 2

disposing the substrate obliquely with respect to the deposition source such that the particles forming the functional film layers of the anode structure are arranged in a fixed direction

Methodology Applied
Scientific EffectPreferred orientation:

Data Source

PatentUS10741783B2Light emitting device and manufacturing method for the same
Publication Date: 2020.08.11 WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO LTD
  • US10741783B2 patent drawing
  • US10741783B2 patent drawing
  • US10741783B2 patent drawing

AI summary

The present application provides a light emitting device and a manufacturing method for the same. The light emitting device includes a substrate and an anode structure disposed on the substrate, which is formed by depositing particles on a surface of the substrate through a deposition source. During the process of the anode structure, the substrate is disposed obliquely with respect to the deposition source such that the particles of the functional film layers of the anode structure are arranged in a fixed direction, thereby increasing the work function of the anode structure.